1968
DOI: 10.1149/1.2411162
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Thickness Measurements of Silicon Dioxide Films on Silicon by Infrared Absorption Techniques

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1969
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Cited by 29 publications
(10 citation statements)
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“…Transmission spectra of silica obtained at much better quality can be found elsewhere. 31,51,[67][68][69] Absorbance in the 1300-1000 cm À1 range of silica is the subject of extensive investigation. In transmission spectra of thin SiO 2 films obtained at normal incidence of the IR beam, a clear shoulder is observed at ;1150 cm À1 .…”
Section: Resultsmentioning
confidence: 99%
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“…Transmission spectra of silica obtained at much better quality can be found elsewhere. 31,51,[67][68][69] Absorbance in the 1300-1000 cm À1 range of silica is the subject of extensive investigation. In transmission spectra of thin SiO 2 films obtained at normal incidence of the IR beam, a clear shoulder is observed at ;1150 cm À1 .…”
Section: Resultsmentioning
confidence: 99%
“…39 In reflection spectra, the m AS peak shows up at ;1120 cm À1 . 45,51,[67][68][69] The behavior of the 1150 cm À1 peak observed in ATR spectra clearly indicates that this mode is located at the sample surface; therefore, it cannot be assigned to the bulk TO or LO modes. It is known that the absorptivity of the m AS fundamental (observed in transmission spectra at approximately 1100 cm À1 ) is very high: e k ; 1.5 lm À1 .…”
Section: Resultsmentioning
confidence: 99%
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“…The integrated area of the peak at 1036 cm -1 (Si−O stretching) , increases linearly with the number of coats, corroborating the conclusions made on the basis of ellipsometry. This linear relationship has previously been used to measure thickness of SiO 2 films on silicon. ,
7 IR spectra of 1, 5, and 10 coats of 1Mg:Si sol 1 on a silicon wafer before heating.
…”
Section: Resultsmentioning
confidence: 99%
“…It is recommended that anyone who uses the table carefully examine the material and references cited in the above-named references as well as other references [18][19][20][21][22][23][24][25] listed. …”
mentioning
confidence: 99%