Carbon configuration
is a critical factor in determining the electrical,
tribological, and mechanical properties of carbon films. In this work,
we synthesized carbon films on a silicate glass by sputtering a graphite
target in an Ar atmosphere while varying the DC sputtering power.
Using Raman spectroscopy and photoemission analysis, we found that
the carbon films produced at low sputtering power consisted mainly
of sp3 bonds, while sp2 carbon ordering became
dominant as the sputtering power increased. The sp2/sp3 ratio of the carbon film controlled by the sputtering power
is associated with two competing carbon deposition mechanisms: (1)
collision between the incoming carbon ions and surface carbon atoms
at low power (sub-plantation model) and (2) sp3-to-sp2 rehybridization caused by excessive kinetic energy of the
incoming carbon ions at high power (thermal relaxation). As the sputtering
power increased, the friction, adhesion, and energy dissipation decreased,
despite negligible topographical variations, while the conductivity
rapidly increased. We fabricated a triboelectric nanogenerator with
high durability by utilizing the low friction properties of the sputtered
carbon films. Our results show a straightforward and effective way
to control the properties of carbon films, which can be used as promising
coating films for frictionless protection.