Thickness Description of Thick GaN Film Stack and Measurement of Al Percentage in AlGaN Alloy with KLA SpectraShape™ 10K

Baldi, Giulio; De Paola, Francesco; Mongiatti, Isabelle; Severino, Andrea

doi:10.1109/asmc61125.2024.10545467

2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2024

DOI: 10.1109/asmc61125.2024.10545467

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Thickness Description of Thick GaN Film Stack and Measurement of Al Percentage in AlGaN Alloy with KLA SpectraShape™ 10K

Giulio Baldi,

Francesco De Paola,

Isabelle Mongiatti

et al.

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Thickness Description of Thick GaN Film Stack and Measurement of Al Percentage in AlGaN Alloy with KLA SpectraShape™ 10K

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References 9 publications

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