Recently, magnetic antidot arrays have been studied extensively [1,2] due to their potential applications in magnetic recording media, sensors and flux pinning in superconductors . Magnetic antidot arrays with perpendicular anisotropy, which consist of densely packed nonmagnetic nano-columns within exchange coupled magnetic grains, can be regarded as the percolated perpendicular media [3] . The nonmagnetic nano-columns can serve as pinning sites which can influence the magnetic properties of films . It is a great challenge to obtain tunable antidot arrays with controlled orientation, high areal density and large area . L1 0 -CoPt and FePt alloys are ideal candidates for ultrahigh density data storage media due to their high anisotropy constant [4] . In this work, we fabricated CoPt/Ag antidot arrays with small size and high areal density, using ultrathin anodic aluminum oxide (AAO) template as a dry etching mask . Ag as an underlayer can reduce the ordering temperature and enhance the (001) texture [5] . Compared to other methods such as direct deposition of a CoPt thin film on AAO templates, this method has the advantage of easily controllable (001) orientation, while the orientation of CoPt films directly deposited on the amorphous AAO template would be random . Direct deposition also cannot obtain a clean antidot array since the deposited material inevitably lands on side walls and/or on the substrate . Fig . 1 (a) shows XRD pattern for CoPt(15 nm)/Ag(5 nm) film annealed at 600 °C . It can be seen that CoPt film exhibits strong (001) and (002) peaks, which means that the L1 0 ordered phase with (001) texture is formed . The Ag underlayer not only lowers the ordering temperature, but also helps to induce the perpendicular orientation of the c-axis [5] . As seen from Fig . 1 (b), the perpendicular coercivity H c (P) greatly exceeds the parallel H c (H), indicating a high degree of preferential perpendicular orientation . The hysteresis loops are minor loops due to the limited applied field range . The ultrathin AAO template exhibits highly ordered porous structure with pore diameter of 45 nm, interpore distance of about 100 nm ( Fig . 2 (a)) and a pore depth of 200 nm . Using such template as the dry etching mask, magnetic antidot arrays were fabricated that closely replicate the structure of the template, as seen in Fig, 2(b) . The structural parameters of the template including the pore diameter and interpore distance can be tuned by the applied voltages; the pore diameter can be further controlled by immersing the templates in phosphoric acid for different durations . The morphology and magnetic behavior of the antidot arrays can thus be tuned accordingly; cm-sized antidot arrays can be fabricated with very low cost . It can be observed that the CoPt/Ag antidot array keeps the preferential perpendicular orientation of the film, as shown in Fig . 2 . (c) . Fig . 2 . (d) shows the magnetic hysteresis loops of CoPt/Ag antidot array . The nonmagnetic nano-columns can serve as pinning sites, impeding the domain wa...