Thickness and Topography of Dielectric Dual-Sidewall Spacers on Metal Gate of DRAM Extracted by Spectroscopic Ellipsometry

Gong, Junhua; Fang, Yeh-Chang; Wang, Ta-Yung; Hu, Jiarui; Chang, Chung-I; Wang, Tings; Lee, Shih-Jung; Opsal, Jon; Nicolaides, Lena

doi:10.1109/asmc.2007.375115

2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2007

DOI: 10.1109/asmc.2007.375115

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Thickness and Topography of Dielectric Dual-Sidewall Spacers on Metal Gate of DRAM Extracted by Spectroscopic Ellipsometry

Junhua Gong

Yeh-Chang Fang

Ta-Yung Wang

et al.

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Thickness and Topography of Dielectric Dual-Sidewall Spacers on Metal Gate of DRAM Extracted by Spectroscopic Ellipsometry

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