Thick polymer cover layers for laser micromachining of fine holes

Li, Z.L.; Lin, Tingting; Moran, P.M.

doi:10.1007/s00339-004-3024-0

Cited by 2 publications

(2 citation statements)

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“…Laser microdrilling of a material involves using multiple pulses of laser illumination which melts and ablates the material and thereby results in a hole being drilled [1][2][3][4][5][6][7]. When these pulses illuminate the surface at high repetition rates, each successive pulse is illuminating an area heated by previous pulses before the area has had time to cool down.…”

Section: Introductionmentioning

confidence: 99%

“…We remark that measuring the pulse energy and the beam profile at the bottom of the hole is difficult and differs from that at the surface because of reflections occurring at the surface of the hole interior [1]. We first studied experimentally and numerically the dependence on pulse repetition frequency of the ablation threshold at the glass surface.…”

Section: Introductionmentioning

confidence: 99%

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Heat accumulation in microdrilled glass from ultraviolet laser ablation

et al. 2015

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We present numerical and experimental studies of heat accumulation during high-aspect-ratio ultraviolet laser microdrilling of glass. The dependence on pulse repetition rate of the ablation threshold was studied. The rate determines the amount of heat accumulation and temperature variation across the illuminated area. No change in the glass was observed for pulse energies below 1 lJ at 1 kHz; melting occurred at 0.3 lJ, with ablation at 0.7 lJ at 20 kHz. Also, the hole depth doubled when the pulse repetition rate was increased from 1 to 20 kHz. Moreover, the fluence of *4 J/cm 2 that passed through drilled holes at 1 kHz decreased to *1 J/cm 2 at 20 kHz.

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