Thermooptically tunable optical phased array in SiO/sub 2/-Si

Dieckroger, J.; Marz, R.; Clemens, P.; Heise, G.; Schneider, H. W.

doi:10.1109/68.740719

Cited by 16 publications

(6 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…For example, the reported modulation efficiency of AWGs based on silica [16] is 2 nm∕W. On the other hand, the modulation efficiency of the AWG in this Letter is comparable to that of the latest reported wavelength tunable AWG [19] based on SOI, whose modulation efficiency is about 3.9 nm∕W, but the latter is fabricated by a more complicated processes.…”

supporting

confidence: 50%

See 1 more Smart Citation

Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect

Yuan

Wang

et al. 2018

Chin. Opt. Lett.

View full text Add to dashboard Cite

In this Letter, a 16 channel 200 GHz wavelength tunable arrayed waveguide grating (AWG) is designed and fabricated based on the silicon on insulator platform. Considering that the performance of the AWG, such as central wavelength and crosstalk, is sensitive to the dimension variation of waveguides, the error analysis of the AWG with width fluctuations is worked out using the transfer function method. A heater is designed to realize the wavelength tunability of the AWG based on the thermo-optic effect of silicon. The measured results show that the insertion loss of the AWG is about 6 dB, and the crosstalk is 7.5 dB. The wavelength tunability of 1.1 nm is achieved at 276 mW power consumption, and more wavelength shifts will gain at larger power consumption.

show abstract

supporting

confidence: 50%

“…Therefore, compensation for the wavelength shift of the AWG is necessary. There are many reports about wavelength tunable AWGs based on silica [19] , InP [20] , and polymer [21] , but there are only a few on wavelength tunable AWG based on SOI [22] .…”

mentioning

confidence: 99%

Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect

Yuan

Wang

et al. 2018

Chin. Opt. Lett.

View full text Add to dashboard Cite

show abstract

“…To increase the efficiency and control of the grating temperature, the idea of thin-film heaters placed directly on the grating during wafer manufacture is considered. This approach has been discussed by Dieckroger and Joyner, et al [6], [7] The heater elements are constructed of tungsten with aluminum interconnects to bond pads to facilitate off-chip connections. To maintain control, tungsten feedback sensors are also constructed on the chip.…”

Section: Integrated Heater Developmentmentioning

confidence: 99%

“…It can be described as where is the initial resistance and is the temperature coefficient of resistance change. The temperature of sensor, , can be described as the ambient temperature, , and heater induced temperature change (4) Meanwhile, we can describe the equivalent temperature of grating change induced by heater as (5) also, the equivalent temperature is defined as the central wavelength change, , and it also described by setting temperature in conventional homogenous heating case as (6) by combining (5) and (6), we have (7) by substituting (7) into (4), we simply have (8) where…”

Section: Sensor Accuracy and Control Algorithmmentioning

confidence: 99%

Integrated thin film heater and sensor with planar lightwave circuits

Yan

Tarter

Weaver³

et al. 2005

IEEE Trans. Comp. Packag. Technol.

View full text Add to dashboard Cite

This paper describes the use of integrated heaters and closed-loop applications for temperature control of planar waveguide circuits. The history of arrayed waveguide gratings (AWG) temperature control is discussed along with the difficulties in applying this control. Modeling and measurement results for external and integrated heaters will be presented. Fundamental considerations as well as modeling and measurement of the thermal characteristics of various physical constructions are discussed, and the rationale for applying these disciplines to a given problem is highlighted. In this work, we will present the evolution of these unique integrated thin film heaters and review thermal-optical modeling to experimental demonstration of the AWG. The goal of the work is to provide a solution path for integration of multiple optical devices on a single substrate from a thermomechanical as well as optical discipline point of view.Index Terms-Arrayed waveguide grating (AWG), center wavelength (CW), dense wavelength division multiplexing (DWDM), index, optical network, optical waveguide, planar lightwave circuits (PLC), sensor, temperature control, thermistor, thin-film heater, variable optical attenuator (VOA). NOMENCLATURECenter wavelength. Diffraction order of a grating. Effective refractive index. Path length difference.

show abstract

“…It has distinct advantages over other alternative device structures for multichannel narrow band filtering. Due to its unique applications, AWG have been widely demonstrated in C-band on various integration platforms [28]- [33]. An InP-based AWG operated at 2-μm is first demonstrated for WDM transmission to increase the data capacity [26].…”

Section: Introductionmentioning

confidence: 99%

Thermo-Optic Tunable Silicon Arrayed Waveguide Grating at 2-μm Wavelength Band

Liu

et al. 2020

IEEE Photonics J.

View full text Add to dashboard Cite

The transparent window in optical fiber at 2-μm waveband enables a huge potential for fiber optical communications. Intensive efforts have been devoted to pursuit of photonic devices in this new band. The arrayed waveguide grating (AWG) is one of the key components for various functionalities like wavelength multiplexer, optical filter, spectrometer and so forth. However, the integrated and wavelength tunable AWG has not been realized in the 2-μm wavelength range yet. Here, we demonstrate an 8-channel thermo-optic tunable AWG at 2 μm via silicon photonic multi-project wafer shuttle run. The device is fully compatible with standard foundry fabrication process without customization. The TiN heater is designed for uniform waveguide heating and wavelength detuning. Experiments show that the fabricated AWG has a dense channel spacing of 1.6 nm and a minimum insertion loss of 6.1 dB. The wavelength tuning efficiency is measured to be 6.4 nm/W.

show abstract

Thermooptically tunable optical phased array in SiO/sub 2/-Si

Cited by 16 publications

References 6 publications

Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect

Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect

Integrated thin film heater and sensor with planar lightwave circuits

Thermo-Optic Tunable Silicon Arrayed Waveguide Grating at 2-μm Wavelength Band

Contact Info

Product

Resources

About