Thermomechanical characterization of on-chip buckled dome Fabry–Perot microcavities

Abstract

Abstract:We report on the thermo-mechanical and thermal tuning properties of curved-mirror Fabry-Perot resonators, fabricated by the guided assembly of circular delamination buckles within a multilayer a-Si/SiO2 stack. Analytical models for temperature dependence, effective spring constants, and mechanical mode frequencies are described and shown to be in good agreement with experimental results. The cavities exhibit mode volumes as small as ~10 3 , reflectance-limited finesse ~3x10 3 , and mechanical resonance frequencies in the MHz range. Monolithic cavity arrays of this type might be of interest for applications in sensing, cavity quantum electrodynamics, and optomechanics.

On-Chip High-Finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

“…However, there are few options that promise fully monolithic integration of tunable high-finesse, open access microcavities on chips. Our group has reported a thin-film buckling approach [ 15 , 16 , 21 , 88 ] with potential to address this latter point. We’ve shown that circular delamination buckles can be controllably formed within a multilayer thin film stack, and that these features can behave as half-symmetric Fabry-Perot cavities.…”

“…Others have employed wafer-bonding approaches combined with precision alignment stages [ 14 ]. However, the realization of truly monolithic, curved mirror FPCs with high F and low V M remains at a relatively nascent stage of development [ 15 , 16 ].…”

“…For the case of plano-concave or half-symmetric cavities where ρ 2 is infinite and thus | ρ 1 | << | ρ 2 | (as in the case of refs. [ 15 , 16 , 21 , 22 ]), the beam waist lies at the planar mirror and is given by the expression: …”

On-chip High-finesse Fabry-Perot Microcavities for Optical Sensing and Quantum Information

“…However, there are few options that promise fully monolithic integration of tunable high-finesse, open access microcavities on chips. Our group has reported a thin-film buckling approach [15,16,20,86] with potential to address this latter point. We've shown that circular delamination buckles can be controllably formed within a multilayer thin film stack, and that these features can behave as half-symmetric Fabry-Perot cavities.…”

“…Others have employed wafer-bonding approaches combined with precision alignment stages [14]. However, the realization of truly monolithic, curved mirror FPCs with high F and low Vm remains at a relatively nascent stage of development [15,16].…”