2013
DOI: 10.1088/0268-1242/28/3/035010
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Thermoelectric transport and Hall measurements of low defect Sb2Te3thin films grown by atomic layer deposition

Abstract: Sb2Te3 has recently been an object of intensive research since its promising applicability in thermoelectric, in phase-change memory devices and as a topological insulator. In this work we report highly textured Sb2Te3 thin films, grown by atomic layer deposition on Si/SiO2 wafers based on the reaction of SbCl3 and Te(SiMe3)2. The low deposition temperature at 80° C allows for the pre-patterning of the Sb2Te3 by standard lithography processes. A platform to characterize the Seebeck-coefficient S, the electrica… Show more

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Cited by 69 publications
(67 citation statements)
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“…However, in contrast to previous theoretical model calculations, 7,8 decreased values of S were found experimentally [9][10][11] for Bi 2 Te 3 and Sb 2 Te 3 thin films and were recently corroborated by both model 12,13 and ab initio calculations 4 of our groups.…”
supporting
confidence: 59%
See 1 more Smart Citation
“…However, in contrast to previous theoretical model calculations, 7,8 decreased values of S were found experimentally [9][10][11] for Bi 2 Te 3 and Sb 2 Te 3 thin films and were recently corroborated by both model 12,13 and ab initio calculations 4 of our groups.…”
supporting
confidence: 59%
“…[9][10][11] By means of ab initio electronic structure calculations based on density functional theory we discussed the thermoelectric properties of the p-type TI Sb 2 Te 3 for various film thicknesses and temperatures. The topologically protected surface-state leads to metallic conduction of the thin films even in the semiconducting regime.…”
Section: Resultsmentioning
confidence: 99%
“…Additionally, Sb 2 Te 3 is an important p -type element in thermoelectric modules. In early work, Hicks and Dresselhaus proposed that low-dimensional systems could enhance the thermoelectric efficiency through an enlarged thermopower22, but a decreased thermopower value was observed in Sb 2 Te 3 thin films; the discrepancy was resolved in recent work on Sb 2 Te 3 thin films232425. The separate contributions to thermopower from the bulk and the surface could cause a decreased total thermopower26.…”
mentioning
confidence: 99%
“…The nanomechanical properties of these two ALD metal telluride films have been investigated by nanoindentation experiments, and published earlier by Mamun et al [9]. The thermoelectric transport properties including the Seebeck coefficient and electrical conductivity of ALD Bi 2 Te 3 films have been reported by Zastrow et al [10]. …”
Section: Resultsmentioning
confidence: 99%