Thermoelectric Micro-Refrigerator Based on Bismuth/Antimony Telluride

Dang, L.; Dang, Tung Huu; Nguyen, Thao T.T.; Nguyen, Thuat; Nguyen, Hue Minh Thi; Nguyen, Thu-Trang; Nguyễn, Hồng Quang

doi:10.1007/s11664-017-5343-x

Cited by 6 publications

(8 citation statements)

References 18 publications

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“…In general, thin films can be manufactured by a variety of methods such as sputtering, thermal evaporation, and molecular-beam epitaxy [35][36][37]. Pulsed electron deposition (PED) is also a physical thin film deposition technique offering many advantages such as high film homogeneity and low cost.…”

Section: Introductionmentioning

confidence: 99%

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

Tran

Tang

Pham

et al. 2019

Journal of Chemistry

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LaMnO3 (LMO) nanopowder was synthesized by the microwave combustion method using glycine and nitrate salts of La and Mn as precursors. The as-prepared LMO powder was pressed at high pressure and annealed at 1000°C for 8 hours to make a target for thin film deposition. The structural and elemental analysis was obtained by X-ray diffraction (XRD) and energy dispersive X-ray spectroscopy (EDS). Thin films of LMO were fabricated using pulsed electron deposition (PED) at room temperature. The effects of discharge voltage and oxygen/argon flux ratio on the produced thin films were studied. The study shows that stoichiometry and structure of the target was preserved well in the thin films prepared with a discharge voltage from 14 to 15 kV, while the oxygen/nitrogen flux ratio did not show a clear effect on the quality of thin films.

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Section: Introductionmentioning

confidence: 99%

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

Tran

Tang

Pham

et al. 2019

Journal of Chemistry

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“…Thus, it is a universal platform to measure thin film thermal conductivity. In another application, we fabricate thermoelectric cooler using Peltier effect in BiTe and SbTe [27], the most popular pair of the thermoelectric material. The hot part of the cooler is placed on the bulk Si wafer, while the cold metallic part is placed on the membrane.…”

Section: Resultsmentioning

confidence: 99%

Fabricating Ultra-thin Silicon Nitride Membranes Suspended on Silicon Wafer

Hong

Tung²,

Anh³

et al. 2021

MaP

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Ultrathin silicon nitride SiNx membrane suspended on a silicon wafer is a popular two-dimensional platform in MEMS applications. The unsupported membrane has a low thermal conductivity, is electrically insulated, and very robust against mechanical impact. Remarkably thin, it is difficult to fabricate and manipulate. Recently equipped with a dual chamber system for plasma enhanced chemical vapor deposition (PECVD) and reactive ion etching, we calibrate it to deposit silicon nitride Si3N4, silicon dioxide SiO2, and to dry etch these materials. Based on the superb quality of Si3N4, we perform a through-wafer etch that creates suspended Si3N4 membranes. The recipe is reliable and reproducible. We analyze the membrane’s chemical composition and optical properties. Although created by PECVD, the membrane is so robust that it survives multiple lithography steps. It extends our capability to study thermal transport at the submicron scale as well as to fabricate micron size devices for MEMS applicati

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“…All materials are of 5N quality. Throughout the evaporation, the flow rates of the two materials are strictly maintained at 0.50 Å s −1 for bismuth and at 1.25 Å s −1 for tellurium, which guarantees the stoichiometry for Bi 2 Te 3 [27]. This is a demanding step, as the evaporation rate is cumulatively sensitive to the supplied currents.…”

Section: Methodsmentioning

confidence: 99%

“…There are many methods that can be used to fabricate Bi 2 Te 3 thin films like exfoliation [19], molecular-beam epitaxy [2], magnetron sputtering [20], pulse laser deposition [21], chemical vapor deposition [22], or thermal evaporation. In the thermal evaporation method, there are numerous variations such as evaporation from one source [23], twostep single-source thermal evaporation [24], co-evaporation [25][26][27], or combined with annealing [28]. In this work, we co-evaporate Bi 2 Te 3 from two sources, which are known to produce high-quality thermoelectric films [9].…”

Section: Introductionmentioning

confidence: 99%

An in-situ thermoelectric measurement apparatus inside a thermal-evaporator

Nguyen

Bui-Thanh

Pham

et al. 2023

Meas. Sci. Technol.

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At the ultra-thin limit below 20 nm, a film's electrical conductivity, thermal conductivity, or thermoelectricity depends heavily on its thickness. In most studies, each sample is fabricated one at a time, potentially leading to considerable uncertainty in later characterizations. We design and build an in-situ apparatus to measure thermoelectricity during their deposition inside a thermal evaporator. A temperature difference of up to 2 K is generated by a current passing through an on-chip resistor patterned using photolithography. The Seebeck voltage is measured on a Hall bar structure of a film deposited through a shadow mask. The measurement system is calibrated carefully before loading into the thermal evaporator. This in-situ thermoelectricity measurement system has been thoroughly tested on various materials, including Bi, Te, and Bi2Te3, at high temperatures up to 500 K.

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Thermoelectric Micro-Refrigerator Based on Bismuth/Antimony Telluride

Cited by 6 publications

References 18 publications

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

Fabricating Ultra-thin Silicon Nitride Membranes Suspended on Silicon Wafer

An in-situ thermoelectric measurement apparatus inside a thermal-evaporator

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Thermoelectric Micro-Refrigerator Based on Bismuth/Antimony Telluride

Cited by 6 publications

References 18 publications

A Novel Approach for Fabricating LaMnO3 Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

A Novel Approach for Fabricating LaMnO3 Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

Fabricating Ultra-thin Silicon Nitride Membranes Suspended on Silicon Wafer

An in-situ thermoelectric measurement apparatus inside a thermal-evaporator

Contact Info

Product

Resources

About

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques

A Novel Approach for Fabricating LaMnO₃ Thin Films Using Combined Microwave Combustion and Pulsed Electron Deposition Techniques