2010
DOI: 10.1063/1.3259649
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Thermoelectric heating of Ge2Sb2Te5 in phase change memory devices

Abstract: We report on the demonstration of the active thermoelectric application to nanometer-scaled semiconductor devices. The thermoelectric heating already exists during programming in conventional phase change memory (PRAM) cells, which is only a minor supplement to Joule heating. Here, by rigorously designing devices, we have demonstrated an unprecedentedly high efficiency of PRAM, where the majority of the heat is supplied by the thermoelectric effect.

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Cited by 39 publications
(19 citation statements)
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“…The position of the amorphous region changes with the bias polarity in PCM cells because Thomson heating alters the temperature distribution during the reset operation. The bias-polarity-dependent behavior was also shown by Suh et al in vertical PCM cells while testing different electrode materials [2]. Their cell performance varies for the electrode material with different Seebeck coefficient due to another thermoelectric effect, known as the Peltier effect.…”
Section: Introductionmentioning
confidence: 53%
See 1 more Smart Citation
“…The position of the amorphous region changes with the bias polarity in PCM cells because Thomson heating alters the temperature distribution during the reset operation. The bias-polarity-dependent behavior was also shown by Suh et al in vertical PCM cells while testing different electrode materials [2]. Their cell performance varies for the electrode material with different Seebeck coefficient due to another thermoelectric effect, known as the Peltier effect.…”
Section: Introductionmentioning
confidence: 53%
“…in which C is the volumetric heat capacity, T is temperature, t is time, k is the thermal conductivity, ρ is the electrical resistivity, j is current density, and µ T is the Thomson coefficient. The equations (2) and 3are coupled with the Laplace equation (∇(σ ∇φ) = 0, where σ is the electrical conductivity and φ is electrical potential). Equation equation 3captures Thomson heating within a homogeneous material.…”
Section: Simulation Detailsmentioning
confidence: 99%
“…28 Moreover, GST can be used as a thermoelectric heater and thermal barrier to improve the memory performance. 29,30 However, low-voltage programming adversely affects the retention characteristics of chalcogenide-based CBRAM devices, giving rise to the voltage-time dilemma. 1,31 It is hence critical to control the formation and rupture of the filamentary conductive channels to improve the resistive switching characteristics of CBRAM devices.…”
Section: Introductionmentioning
confidence: 99%
“…Thermoelectric transport can have a large impact on the performance of semiconductor devices and related nanostructures. [1][2][3][4][5][6] The impact is possibly most pronounced in phase-change memories, which experience both large current densities and temperature excursions exceeding 600 C. Recent measurements provided evidence of thermoelectric transport in phase-change cells by capturing a modification in the amorphous region 1 and the programming condition 2 with the bias polarity. However, there are relatively few data for the thermoelectric properties of phase-change materials at the film thicknesses relevant for contemporary devices.…”
Section: Introductionmentioning
confidence: 99%