Thermodynamic and elastic properties of tungsten and tungsten silicide

Abstract

We present thermodynamic and elastic theory for BCC metal and binary interstitial alloy established by the statistical moment method (SMM) and perform numerical calculations for the silicon concentration, pressure and temperature dependences of nearest neighbor distance, volume, thermal expansion coefficient, heat capacities at constant volume and at constant pressure, Debye temperature, Gruneisen parameter, isothermal elastic modulus, bulk modulus, shearing modulus, elastic constants and longitudinal wave velocity for W and WSi under temperature up to 3600 K, pressure up to 100 GPa and silicon atom concentration up to 5%. The SMM numerical calculations for W are compared with experiments and other calculations. The SMM calculated results for WSi are predictive, orienting experimental results in the future.

Low sheet resistance buried metal bit line realized by high-temperature metal CVD process in vertical channel transistor array

“…[14][15][16] To address this issue, the process technology of metal silicides was modulated to optimize their electrical properties. [17][18][19] We deposited interconnecting metals within the trench, with SiO 2 layers on the top and sides of the silicon pillars serving as hard masks. This approach enabled the formation of BBLs.…”