1999
DOI: 10.1038/23664
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Thermally induced ultrasonic emission from porous silicon

Abstract: The most common mechanism 1 for generating ultrasound in air is via a piezoelectric transducer, whereby an electrical signal is converted directly into a mechanical vibration. But the acoustic pressure so generated is usually limited to less than 10 Pa, the frequency bandwidth of most piezoelectric ceramics is narrow, and it is difficult to assemble such transducers into a fine-scale phase array with no crosstalk 2,3 . An alternative strategy using micromachined electrostatic diaphragms is showing some promise… Show more

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Cited by 232 publications
(192 citation statements)
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“…1,16 So, when using Eq. (9) to calculate TA emission from a small surface area element dΩ of a TA sample with backing, the corrections of both the heat distribution factor at surface due to backing influence and the directivity due to its hemispherical emission should be taken into account.…”
Section: Solution For Ta Emission From Arbitrary Sourcementioning
confidence: 99%
See 2 more Smart Citations
“…1,16 So, when using Eq. (9) to calculate TA emission from a small surface area element dΩ of a TA sample with backing, the corrections of both the heat distribution factor at surface due to backing influence and the directivity due to its hemispherical emission should be taken into account.…”
Section: Solution For Ta Emission From Arbitrary Sourcementioning
confidence: 99%
“…1 Many experimental investigations on this phenomenon and its application were carried out, regarding various aspects of TA ultrasound, such as characteristics, intensification, radiation pressure, three-dimensional image sensing, phased array and impulse operation, and sound reproduction, which show that thermo-acoustic ultrasound has lots of advantages over traditional electric-acoustic ultrasound due to its unique nature −− wideband flat frequency response: larger frequency bandwidth and acoustic pressure, lesser reverberation and distortion, higher sensing accuracy and spatial resolution, easily integrated in MEMs and sound signal self-demodulation, and availability and controllability for finely structured phase arrays operation. [2][3][4][5][6][7][8][9][10][11][12][13] However, theoretical investigation of TA emission seriously lags behind the experimental one due to comparatively fewer efforts.…”
Section: Introductionmentioning
confidence: 99%
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“…The intensity of research and development on light emission in Si is increasing as a result of these stimulating advances in materials engineering and technology. It is likely that a Si-based injection laser will emerge from this research in the near future, although the actual active laser material could be none of those discussed here, because of the burgeoning diversification (7,9,10,106,121,146,(153)(154)(155)(156)(157)(158) in Si-based materials and their applications.…”
Section: Prospects For Silicon Based Optoelectronic Devicesmentioning
confidence: 99%
“…This device is unique in that, unlike common sound generators that depend on mechanical vibrations, it can reproduce sound without the need of a diaphragm. The emitter exhibits a flat sound pressure level at frequencies from 20 to 160 kHz (Figure 2), and can reproduce digitally recorded murine USVs very accurately in terms of duration, frequency, and sound pressure level 15,18,19 .…”
Section: Introductionmentioning
confidence: 99%