Thermally induced formation of metastable nanocomposites in amorphous Cr-Zr-O thin films deposited using reactive ion beam sputtering

Rafaja, David; Wüstefeld, Christina; Abrasonis, G.; Braeunig, Stefan; Baehtz, Carsten; Hanzig, Florian; Dopita, Milan; Krause, Matthias; Gemming, Sibylle

doi:10.1016/j.tsf.2016.06.038

Cited by 8 publications

(3 citation statements)

References 30 publications

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“…Spitz et al mapped the phase formation and microstructure evolution in the Cr-Zr-O system over a wide range of Cr/Zr composition by reactive RF-magnetron sputtering, and showed that the system exhibits different phases: solid solution corundum structure at low Zr-content (< ~31 at%), cubic-(Zr,Cr)O 2 solid solutions at ~50 at % Zr, and monoclinic/tetragonal solid solution (Zr,Cr)O 2 for higher Zr-content [40]. Rafaja et al [42] investigated the influence of different annealing temperatures (i.e. 500 °C to 1100 °C) on the microstructure of as deposited amorphous Cr-rich Cr-Zr-O thin films with up to 15 at.% Zr content.…”

Section: Introductionmentioning

confidence: 99%

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Landälv

Spitz

et al. 2017

Acta Materialia

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Reactive RF-magnetron sputtering is used to grow Cr 0.28 Zr 0.10 O 0.61 coatings at 500 °C. Coatings are annealed at 750°C, 810 °C, and 870 °C. The microstructure evolution of the pseudobinary oxide compound is characterized through high resolution state of the art HRSTEM and HREDX-maps, revealing the segregation of Cr and Zr on the nm scale. The asdeposited coating comprises α-(Cr,Zr) 2 O 3 solid solution with a Zr-rich (Zr,Cr)O x amorphous

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Section: Introductionmentioning

confidence: 99%

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Landälv

Spitz

et al. 2017

Acta Materialia

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“…Thus, the work of Rafaja et al is well in accordance with that of Spitz et al and demonstrates that the approach of combined deposition and annealing can be a valuable design tool to obtain advanced protective oxide thin films. 147…”

Section: B Cr-zr-omentioning

confidence: 99%

Progress in the synthesis of Al- and Cr-based sesquioxide coatings for protective applications

Koller

Stueber

Mayrhofer

2019

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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The challenge of synthesizing protective alumina coatings in corundum structure at moderate temperatures inspired the development of novel strategies of both thin film processing and microstructural thin film design. While the growth of pure corundum coatings is still a domain of chemical vapor deposition, new concepts developed in physical vapor deposition addressed the growth of advanced solid solutions, nanocomposites, or multilayers. The system Al-Cr-O has received huge attention as thin films of the type (Al 1−x Cr x ) 2 O 3 could be grown at substrate temperatures even below 500 °C in laboratory model experiments. These coatings offer particular potential for applications that require chemical inertness, thermal stability, mechanical strength, and excellent tribological properties at elevated temperatures. Mastering its low temperature deposition is one of the major aims of industrial research, as it would also enable the protection of temperature-sensitive components and consequently path the way for novel, yet not realizable applications. This work summarizes the state of the art and recent progress in the development and synthesis of such sesquioxide protective coatings prepared by physical vapor deposition. General coherencies are described for (Al 1−X Cr x ) 2 O 3 coatings. Topics covered are important growth parameters (i.e., the oxygen gas flow and the substrate bias), the chemical composition and its impact on alloying concepts applicable to (Al 1−x Cr x ) 2 O 3 coatings, specific architectural coating designs, and relevant properties such as the thermal stability and material response upon annealing in oxidative environments. In addition, a brief outlook into the development of other Cr-based sesquioxide thin films, (Cr,Zr) 2 O 3 and (Cr,V) 2 O 3 , is given.

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“…Rafaja et al [42] deposited amorphous Cr-rich Cr-Zr-O thin films with up to 15 at.% Zr content and performed in situ synchrotron-based X-ray diffraction (XRD) while vacuum annealing (500-1100°C). The Zr content in the hightemperature crystallized a-(Cr,Zr) 2 O 3 contained up to 3.2 at.% Zr, while the excess Zr formed tetragonal ZrO 2 , stabilized by Cr.…”

Section: Introductionmentioning

confidence: 99%

Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)₂O₃ coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum

Landälv

Rogström

et al. 2019

J. Mater. Res.

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Thermally induced formation of metastable nanocomposites in amorphous Cr-Zr-O thin films deposited using reactive ion beam sputtering

Cited by 8 publications

References 30 publications

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Progress in the synthesis of Al- and Cr-based sesquioxide coatings for protective applications

Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)₂O₃ coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum

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Thermally induced formation of metastable nanocomposites in amorphous Cr-Zr-O thin films deposited using reactive ion beam sputtering

Cited by 8 publications

References 30 publications

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Structural evolution in reactive RF magnetron sputtered (Cr,Zr)2O3 coatings during annealing

Progress in the synthesis of Al- and Cr-based sesquioxide coatings for protective applications

Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)2O3 coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum

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Product

Resources

About

Phase evolution of radio frequency magnetron sputtered Cr-rich (Cr,Zr)₂O₃ coatings studied by in situ synchrotron X-ray diffraction during annealing in air or vacuum