2006
DOI: 10.1063/1.2388135
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Thermally actuated untethered impact-driven locomotive microdevices

Abstract: The authors have developed steerable locomotive devices as small as 30μm using the inertial impact drive as the thrust method. The devices consist of three-legged, thin-metal-film bimorphs designed to rest on three sharp tips with the device body curved up off the surface. Rapid, thermally induced curvature of one leg leads to stepwise translation on a low friction surface. A focused laser was used to supply energy and its parameters controlled the velocity and direction of motion of the device.

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Cited by 84 publications
(60 citation statements)
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“…The net result is translation in the direction of the oscillating arm. This type of stick-slip motion has been used by other microrobots [3][4][5]10].…”
Section:  Front Leg Rear Legsmentioning
confidence: 99%
“…The net result is translation in the direction of the oscillating arm. This type of stick-slip motion has been used by other microrobots [3][4][5]10].…”
Section:  Front Leg Rear Legsmentioning
confidence: 99%
“…Tetherless microrobot actuation has been achieved using a number of different power delivery methods including optical [2], electrostatic [3], thermal [4], ultrasonic [5] and electromagnetic [6]. A review of propulsion methods specific to swimming microrobots medical applications is given in [7].…”
Section: Open Accessmentioning
confidence: 99%
“…This implies that the pinned assumption was false, and the micro-robot has broken contact with the surface. Equations (10)(11)(12) are resolved using N = 0 and F f = 0.…”
Section: Magnetic Micro-robotmentioning
confidence: 99%
“…These limitations include restrictions such as requiring tethers [1]- [3], a fluid environment [4]- [7], or a specialized operating surface [8]- [11]. Further, though many miniature robots exist on the centimeter or millimeter scale, true micron-scale robots, with all characteristic lengths on the order of tens to hundreds of microns, are still quite rare [4], [5], [9], [11], [12].…”
Section: Introductionmentioning
confidence: 99%