International Congress on Applications of Lasers &Amp; Electro-Optics 2004
DOI: 10.2351/1.5060319
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Thermal stress analysis on laser scribing of glass

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Cited by 5 publications
(6 citation statements)
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“…利用非预制轨迹热裂法切割玻璃片时, 提升切 割速度的一种有效方法是改变热源能量分布形状和 施加冷却。Yamamoto 等 [24][25][26][27][28][29] 采用椭圆形分布 CO 2 激光+水冷的方法对玻璃进行热裂切割, 首先用金 刚石砂轮在划切路径首端一侧玻璃平板边缘上表面 预制裂纹缺口, 然后用椭圆形 CO 2 激光光斑进行热 裂, 激光光斑尺寸为 22 mm2.1 mm, 最后在其扫描 方向光斑后方随动喷水进行冷却以完成热裂切割。 研究表明, 提高激光热源功率或施加冷却措施可使 初始裂纹处的应力强度因子快速达到阈值, 以此提 升切割速度。 2010 年美国康宁公司 Abramov 等 [30][31] 采用激光诱导热裂切割化学强化玻璃,他们采用线 状光斑(椭圆光斑长轴长度与短轴长度的比值极大) 的 CO 2 激光, 对中心拉应力为 26~45 MPa 的 1 mm 厚的强化玻璃进行了激光诱导热裂切割。2011 年, 他们又实现了 1000 mm/s 的玻璃切割速度, 并且将切 割后材料边缘处的残余应力值控制在 3. 49 [33] Fig.…”
Section: 切割速度unclassified
“…利用非预制轨迹热裂法切割玻璃片时, 提升切 割速度的一种有效方法是改变热源能量分布形状和 施加冷却。Yamamoto 等 [24][25][26][27][28][29] 采用椭圆形分布 CO 2 激光+水冷的方法对玻璃进行热裂切割, 首先用金 刚石砂轮在划切路径首端一侧玻璃平板边缘上表面 预制裂纹缺口, 然后用椭圆形 CO 2 激光光斑进行热 裂, 激光光斑尺寸为 22 mm2.1 mm, 最后在其扫描 方向光斑后方随动喷水进行冷却以完成热裂切割。 研究表明, 提高激光热源功率或施加冷却措施可使 初始裂纹处的应力强度因子快速达到阈值, 以此提 升切割速度。 2010 年美国康宁公司 Abramov 等 [30][31] 采用激光诱导热裂切割化学强化玻璃,他们采用线 状光斑(椭圆光斑长轴长度与短轴长度的比值极大) 的 CO 2 激光, 对中心拉应力为 26~45 MPa 的 1 mm 厚的强化玻璃进行了激光诱导热裂切割。2011 年, 他们又实现了 1000 mm/s 的玻璃切割速度, 并且将切 割后材料边缘处的残余应力值控制在 3. 49 [33] Fig.…”
Section: 切割速度unclassified
“…Figure 11͑d͒ shows the condition when the cooling area is far away from the mask ͑W m Ͻ y t max ͒. 12 to be the threshold value of scribing enabled conditions obtained from the three-dimensional thermal stress analysis. 11͑a͒, after t max decreases gradually and reaches the local minimum.…”
Section: A Discontinuation Of Crack Propagation In the Scribing Dirementioning
confidence: 99%
“…As stated in the previous study, 12,13 based on the results of crack depth and crack profile obtained in laser scribing experiments, the authors conducted thermal stress analysis by using a finite element method ͑FEM͒ and proposed a laser scribing mechanism by means of a schematic of the cross section of the cooling area as shown in Fig. 1.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the sharp temperature gradient in the thickness direction, a compressive stress is generated inside the glass, and a tensile stress is generated in the vicinity of the surface. The tensile stress causes the initial crack to propagate, and a shallow crack (hereinafter called a median crack) is produced on the surface along the laser beam scanning line [3].…”
Section: Introductionmentioning
confidence: 99%
“…It has been shown [4] that fewer particles are generated and the edge strength is increased through laser scribing under the condition of proper heat input. Yamamoto [3] has shown that a suitable range of scribing conditions can be estimated by a two-dimensional thermoelastic analysis, defining such processing conditions as suitable when a median crack is produced without damage. However the cause of the secondary cracks was not clarified.…”
Section: Introductionmentioning
confidence: 99%