Novel fluorine doped zinc tin oxide (ZTO:F) thin-film transistor (TFT) was fabricated by an aqueous sol-gel method and their bias-temperature-illumination stability were observed. ZTO:F TFT optimized at Sn:Zn = 1:1 composition exhibits high field-effect mobility of 11.52 cm 2 /V · s at a process temperature of 350 • C. In particular, the TFT displays a small negative threshold voltage shift of approximately 1 V under positive bias-temperature-illumination stress. This is attributed to asymmetry of the recombination for photo-generated holes with the free electrons at the ZTO:F channel/gate dielectric interface due to the substitution of oxygen by fluorine with different electrovalence.Amorphous oxide thin film transistors (TFTs) are attractive switching devices for active matrix displays due to their superior performance and good uniformity compared to Si-based TFTs. 1 Another advantage of oxide semiconductors is that they can be produced using a solution process such as spin-coating or inkjet-printing thus enable simple and low cost fabrication. Solution processed oxide TFTs have exhibited the remarkable performances such as high mobility, bias stability, and low annealing temperature although they basically require an annealing process to obtain a dense oxide structure. 2-6 Seo et al. attempted to obtain the high performance, 2 to lower the annealing temperature 3 and to ensure the bias stability under humidity and bias stress. 4 Park et al. and Avis et al. demonstrated bias stability of oxide TFTs for application to electronic device such as organic light emitting diodes (OLEDs) utilizing a patterned structure 5 and the use of an inkjet process, 6 respectively. The poor stability of oxide TFT devices leads to deterioration of the current-voltage (I-V) characteristics under prolonged current and gate bias, resulting in a threshold voltage shift which can affect the brightness of OLED devices. 7 In this study, we present a fluorine doped zinc tin oxide (ZTO:F) TFT with a very high mobility of 11.52 cm 2 /V · s by applying an aqueous solution process using metal fluoride precursors. The stability test of ZTO:F TFT was investigated with applying a methacrylate hybrid material passivation layer that has an excellent gas barrier property. 8,9 Interestingly, the small negative threshold voltage shift ( V th ) less than 1 V under positive bias-temperature-illumination stress condition was observed. It is thought that the dominant factor of the extraordinary result to the conventional report is due to the M-F bonds at the ZTO:F channel/gate dielectric interface.The ZTO:F solution is prepared by using zinc fluoride hydrate (ZnF 2 · xH 2 O) and tin fluoride (SnF 2 ), with water as a solvent. The concentration of metal precursors was 0.2 M, and the molar ratio of (Sn/Sn+Zn) was 0.5. The solution was stirred for 4 hr at room temperature in a glass vial and a clear colorless solution was obtained. The heavily boron doped (p + ) Si substrate with a thermally grown 100 nm thick SiO 2 was ultra-sonicated in deionized water for...