Thermal stability of Au–TiO2 nanocomposite films prepared by direct liquid injection CVD

Avril, L.; Bourgeois, S.; Lucas, M.C. Marco de; Domenichini, B.; Simon, Pardis; Addou, Fouzi; Boudon, Julien; Potin, Valérie; Imhoff, L.

doi:10.1016/j.vacuum.2015.06.018

Cited by 18 publications

(9 citation statements)

References 45 publications

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“…The Direct Liquid Injection (DLI) system (Annealsys MC-050) is based on the atomized liquid injection of the precursor solution to generate the reactive vapor. According to the operating parameters, this device works in CVD or ALD mode [26,27]. The silicon substrates were laid on a silicon carbide coated graphite susceptor supported by a quartz holder inside a quartz reactor.…”

Section: Ald Processmentioning

confidence: 99%

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Birnal

Lucas

Pochard

et al. 2020

Applied Surface Science

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Section: Ald Processmentioning

confidence: 99%

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Birnal

Lucas

Pochard

et al. 2020

Applied Surface Science

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“…Changing the content of the precursor reservoir can control film doping, and the precursor solution containing the preformed NPs can be deposited along with any chemically compatible precursor to produce a wide range of nanocomposite thin films. 8,[10][11][12] Second, the attractivity of CVD due to the control it offers over film composition, coverage, and uniformity. Third, their wide use in industrial applications such as microelectronics and glazing.…”

Section: Introductionmentioning

confidence: 99%

Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions

Vervaele

Roo

Deschaume

et al. 2016

Review of Scientific Instruments

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Nanoparticles of different materials are already in use for many applications. In some applications, these nanoparticles need to be deposited on a substrate in a fast and reproducible way. We have developed a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using a liquid nanoparticle precursor. The system was designed to deposit nanoparticles in a controlled and reproducible way by using two direct liquid injectors to deliver nanoparticles to the system. The nanoparticle solution is first evaporated and then the nanoparticles flow onto a substrate inside the vacuum chamber. To allow injection and evaporation of the liquid, a direct liquid injection and vaporization system are mounted on top of the process chamber. The deposition of the nanoparticles is controlled by parameters such as deposition temperature, partial pressure of the gases, and flow rate of the nanoparticle suspension. The concentration of the deposited nanoparticles can be varied simply by changing the flow rate and deposition time. We demonstrate the capabilities of this system using gold nanoparticles. The selected suspension flow rates were varied between 0.25 and 1 g/min. AFM analysis of the deposited samples showed that the aggregation of gold nanoparticles is well controlled by the flow and deposition parameters.

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“…24 In the Au 4f XPS spectra of TiO 2 /1Au, TiO 2 /5Au, and TiO 2 /10Au, Au 0 peaks were detected and attributed to metallic Au. 24,25 For TiO 2 /1Au and TiO 2 /5Au, Au 3+ peaks 11 were also detected. Although Au was introduced into the TiO 2 layers, the binding energies of O and Ti of the TiO 2 layers formed on the Ti-Au alloys were almost same as those of TiO 2 /0Au, which were attributed to the O 2−24 and Ti 4+23,25 of the TiO 2 .…”

Section: Discussionmentioning

confidence: 90%

“…For TiO 2 /1Au and TiO 2 /5Au, Au 3+ peaks were also detected. Although Au was introduced into the TiO 2 layers, the binding energies of O and Ti of the TiO 2 layers formed on the Ti–Au alloys were almost same as those of TiO 2 /0Au, which were attributed to the O 2− and Ti 4+ of the TiO 2 .…”

Section: Resultsmentioning

confidence: 96%

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Visible‐light‐responsive antibacterial activity of Au‐incorporated TiO₂ layers formed on Ti–(0–10)at%Au alloys by air oxidation

Ueda

Ito

et al. 2019

J Biomedical Materials Res

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Rutile TiO2 layers were formed on substrates of Ti–(0–10)at%Au alloys by a simple process of air oxidation, and their antibacterial activities were evaluated under visible‐light irradiation (λ ≥ 400 nm). Au was introduced into the TiO2 layers on Ti–(1–10)at%Au alloys and existed as both metallic Au nanoparticles and dissolved Au3+ ions. The TiO2 layers that formed on Ti–5at%Au and Ti–10at%Au alloys exhibited visible‐light photocatalytic activity, that is, degradation of stearic acid and antibacterial activity against Escherichia coli. These visible‐light activities were attributed to the surface plasmon resonance of metallic Au nanoparticles and the decrease in bandgap energy caused by dissolved Au3+ ions. The formation of hydroxyl radicals observed under visible‐light irradiation is attributable to antibacterial activity. From a cost perspective, a Ti–5at%Au alloy is more suitable as a substrate for the formation of a TiO2 layer with antibacterial properties than a Ti–10at%Au alloy. © 2019 Wiley Periodicals, Inc. J Biomed Mater Res Part A: 107A: 991–1000, 2019.

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Thermal stability of Au–TiO2 nanocomposite films prepared by direct liquid injection CVD

Cited by 18 publications

References 45 publications

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions

Visible‐light‐responsive antibacterial activity of Au‐incorporated TiO₂ layers formed on Ti–(0–10)at%Au alloys by air oxidation

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Thermal stability of Au–TiO2 nanocomposite films prepared by direct liquid injection CVD

Cited by 18 publications

References 45 publications

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Photocatalytic properties of atomic layer deposited TiO2 inverse opals and planar films for the degradation of dyes

Development of a new direct liquid injection system for nanoparticle deposition by chemical vapor deposition using nanoparticle solutions

Visible‐light‐responsive antibacterial activity of Au‐incorporated TiO2 layers formed on Ti–(0–10)at%Au alloys by air oxidation

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Visible‐light‐responsive antibacterial activity of Au‐incorporated TiO₂ layers formed on Ti–(0–10)at%Au alloys by air oxidation