Thermal stability and optical properties of low emissivity multilayer coatings for energy-saving applications

Tsai, Du-Cheng; Chang, Zue-Chin; Kuo, Bing-Hau; Chen, Erh-Chiang; Huang, Yen-Lin; Hsieh, Tsung-Ju; Shieu, Fuh‐Sheng

doi:10.1016/j.ceramint.2019.12.021

Cited by 13 publications

(12 citation statements)

References 16 publications

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“…The role of the protective layer is to prevent degradation 13,14) of Ag due to these environments. In some cases, heat may be applied in the post-process, 15,16) in which case the protective film is multi-layered to protect the Ag. The optical properties are adjusted to prevent reflection and for the color; these properties can be measured through changes in the reflectance and spectral transmittance, respectively, depending on the film thickness.…”

Section: Introductionmentioning

confidence: 99%

Effect of blocking layer on achieving low sheet resistances in low-E multilayer structures

Mizukoshi

Yamamura

Tomioka³

et al. 2023

Jpn. J. Appl. Phys.

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Low-emissivity films consisting of a metal oxide/Ag/metal oxide structure improve the thermal insulation performance of windows. We carried out a sequential sputtering deposition method for inserting a blocking layer (BL) to achieve both high visible-light transmittance and low sheet resistance. As a result, metallic BLs caused an increase in sheet resistance due to the diffusion of metal atoms into the Ag layer. Oxide BLs deposited under low oxygen concentrations maintained the low sheet resistance. The most significant result was obtained with a TiOx BL deposited under 2.9% oxygen, which prevented an increase in sheet resistance even after the deposition of the top layer (TL). By optimizing the thickness of the TL, high visible-light transmittance and low sheet resistance were achieved in a glass/TiO2/ZnO/Ag/TiOx/ZnO multilayer. Thus, high-performance multilayers could be fabricated by selecting an appropriate BL, which is beneficial for the industrial fabrication of low-E films.

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Section: Introductionmentioning

confidence: 99%

Effect of blocking layer on achieving low sheet resistances in low-E multilayer structures

Mizukoshi

Yamamura

Tomioka³

et al. 2023

Jpn. J. Appl. Phys.

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“…A very thin metal barrier layer must therefore be deposited on top of the noble metal layer. The barrier layer, which could be Ti, Ni, or Cr, is just 2-3 nm thick, so it does not significantly alter the structure's overall properties [19,20]. Fundamental aspects of these types of materials deposited in thin films can be explained by theories such as Time-Dependent Density Functional Theory, among others [21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Cueva,

Carretero

2023

Coatings

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This work analyzed and compared the optical and photoenergetic properties of low-emissivity coatings made from various dielectric materials deposited through magnetron sputtering following a systematic, comparable method. Different multilayer structures of silver-based low-emissivity coatings were studied using SnO2, ZnO, SiAlNx, and aluminum-doped zinc oxide (AZO, which is inherently a semiconductor, but it fulfils an optical dielectric function in this type of structure). The properties of the coatings were determined by spectrophotometric and sheet resistance measurements. Coatings with AZO as the dielectric layers obtain the best photoenergetic performance because silver growth is more efficient on AZO. We also studied the effect of ion bombardment on AZO and SiAlNx in an attempt to obtain a better low-emissivity coating, achieving better results when etching the dielectric layer with an ion gun. Regarding the structures’ visible transmission, the oxides produced better transmission results. Based on the above, we concluded that AZO had the best optical and photoenergetic properties in our deposition system, observing, in the best-case scenario, improvements in emissivity from 0.083 with SnO2 to 0.058 with AZO and to 0.052 using an ion beam on AZO and improvements in visible transmission from 81.9% with SnO2 to 86.8% with AZO.

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“…11) The MO layers further serve to adjust the visible light transmittance 12,13) and to protect the Ag layer when the glass is machined or thermally processed. 14,15) It has been reported that Ag layers with preferential (111) orientation in the plane parallel to the substrate have lower resistivity. [16][17][18] We used a glass/TiO 2 /ZnO/Ag structure, instead of a glass/ZnO/Ag, as the lower part of the MO/Ag/ MO structure.…”

Section: Introductionmentioning

confidence: 99%

Effects of sputtering with Kr gas and insertion of lowermost layer on electrical resistivity of Ag-multilayer

Mizukoshi

Yamamura

Tomioka

et al. 2022

Jpn. J. Appl. Phys.

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Silver-based low-emissivity films have been studied to improve window insulation performance. We have reduced the resistivity of Ag in glass/ZnO/Ag structures by inserting a TiO2 in the lowermost layer. In another study, we have also found that the resistivity of Ag thin film can be reduced by changing the sputtering gas from Ar to Kr. In this study, both methods were adapted to achieve even lower resistivity and the factors involved were analyzed in detail. The lowest electrical resistivity achieved was 3.4 μΩ·cm for a combination of a glass/TiO2/ZnO/Ag structure and Kr gas sputtering, which was 22% less than that for a glass/ZnO/Ag structure with Ar gas sputtering. X-ray diffraction, atomic force microscopy, and secondary ion mass spectroscopy results indicated that the important factor influencing the electrical resistivity was a reduction in the amount of sputtering gas trapped in the Ag layer by depositing the layer using Kr gas.

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Thermal stability and optical properties of low emissivity multilayer coatings for energy-saving applications

Cited by 13 publications

References 16 publications

Effect of blocking layer on achieving low sheet resistances in low-E multilayer structures

Effect of blocking layer on achieving low sheet resistances in low-E multilayer structures

Comparison of the Optical Properties of Different Dielectric Materials (SnO2, ZnO, AZO, or SiAlNx) Used in Silver-Based Low-Emissivity Coatings

Effects of sputtering with Kr gas and insertion of lowermost layer on electrical resistivity of Ag-multilayer

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