MRS Proc. 2000 DOI: 10.1557/proc-624-249 View full text
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G.J. Berry, J.A. Cairns, M.R. Davidson, Y.C. Fan, A.G. Fitzgerald, A.H. Fzea, J. Lobban, P. McGivernt, J. Thomson, W. Shaikh

Abstract: As the trend towards device miniaturisation continues, surface effects and the thermal stability of metal deposits becomes increasingly important. We present here a study of the morphology and composition of platinum films, produced by the UV-induced decomposition of organometallic materials, under various annealing conditions. The surface composition of the metal deposits was studied by X-ray photoelectron spectroscopy, both as-deposited and following thermal treatment. In addition, the morphology of the sur…

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