Thermal process of a silicon wafer under a CW laser and 100–10000 Hz pulsed laser irradiation
Zhichao Jia,
Luanhong Sun,
Xiang Chen
et al.
Abstract:The thermal process of a (001) silicon wafer subjected to a continuous-wave (CW) laser and 100–10000 Hz pulsed laser irradiation is investigated experimentally and numerically. The temperature evolution of the spot center is measured using an infrared radiation pyrometer. The waveforms of the temperature evolution curves provide valuable information about melting, solidification, vaporization, and fracture. To gain a better understanding of the thermal process, a three-dimensional finite element model is estab… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.