Aiming at the reliability of thin-film thermocouples applied to turbine blades at high temperatures, combined with high-temperature tests and finite element analysis, this paper studies its failure mechanism and thermal stress under thermal load. Multi-layer thin-film thermocouple samples were prepared on ceramic substrate, and high-temperature tests were carried out under different temperature loads, and the phenomenon of film shedding and cracking was observed using electron microscope. This paper analyzes the failure mechanism of the film sensor based on the function and structure, and uses ANSYS to analyze the thermal stress distribution of the film under high temperature load. Combining several existing theoretical models, this paper analyzes the factors affecting the thermal stress of the film and conducts simulation verification.