Thermal nanoimprint lithography using fluoropolymer mold

Con, Celal; Zhang, Jian; Jahed, Zeinab; Tsui, Ting Y.; Yavuz, Mustafa; Cui, Bo

doi:10.1016/j.mee.2012.07.007

Cited by 21 publications

(17 citation statements)

References 18 publications

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“…Although Con et al . showed that non‐stick, soft molds could be prepared with a perfluoropolyether (PFPE)‐based elastomer by a UV curing process, the aim of their work was to prepare a fluorinated replica from a hard master, rather than trying to fix a fluorinated polymer film somewhere onto a substrate as a coating layer …”

Section: Resultsmentioning

confidence: 99%

Combined soft lithographic transfer‐printing and patterning method of highly fluorinated polymers as a facile surface treatment protocol

Lee

Jung

Kwon

et al. 2017

J of Applied Polymer Sci

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A combined soft lithographic transfer‐printing and patterning method of highly fluorinated polymers was investigated aiming to establish a facile surface treatment protocol for various substrates. Spin‐coated layers of poly(1H,1H,2H,2H‐perfluorodecyl methacrylate) (PFDMA) on patterned polydimethylsiloxane (PDMS) molds were transfer‐printed successfully on silicon, glass, aluminum substrates, resulting in the well‐controlled production of nano to micrometer‐scale periodic structures. With careful optimization of the dimension and density of the PFDMA patterns, it was possible to achieve a water contact angle as high as 175° on the transfer‐printed highly fluorinated polymer film. One of the advantages of the transfer‐patterning method is that highly fluorinated polymer films can be printed on curved surfaces while retaining their superhydrophobic and corrosion‐prevention character. In addition, the transfer‐printed PFDMA layers on the glass plates showed enhanced light transmission, which led to the extraction of 10% more light when they were applied to the emitting side of green organic light‐emitting devices. The micro‐patterned PFDMA surfaces also exhibited a significantly reduced level of bacterial adhesion when they were incubated in human bile juice. These results strongly suggest that the proposed facile transfer‐patterning protocol of highly fluorinated polymer films can be a suitable surface‐treatment technique for implantable electronic devices that exhibit improved device performance and anti‐biofouling nature. © 2017 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2017, 134, 45184.

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Section: Resultsmentioning

confidence: 99%

Combined soft lithographic transfer‐printing and patterning method of highly fluorinated polymers as a facile surface treatment protocol

Lee

Jung

Kwon

et al. 2017

J of Applied Polymer Sci

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“…After a study by Chou et al [2], research on TH-NIL etching began to gather momentum, but most of it was focused on physical phenomena that occur during processing such as filling, the material properties of the substrate and other materials, stamp manufacturing, and the quality and applications of manufactured shapes [23][24][25][26][27][28][29][30]. Meanwhile, studies on hot plates were conducted as the development of TH-NIL equipment moved forward [31][32][33][34][35]. Kwak et al [32] proposed the concept of a hot plate with horizontally extensible cooling and heating sources that use long rod-shaped cartridge heaters and cooling holes for flowing refrigerant that are staggered vertically.…”

Section: Nil Methods Process Details Mold/substrate Resist Materialsmentioning

confidence: 99%

“…Feedback control is performed on the cartridge heater's heat generation to allow the hot plate temperature to optimally approach the set temperature and stabilize. As done in a previous study [33,34], 6 PID controllers are used to control the 20 heaters. Six temperature monitoring points are arranged as shown in Figure 1a.…”

Section: Physical Modelmentioning

confidence: 99%

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Park¹,

Lee

2019

Applied Sciences

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A numerical study is conducted on the thermal performance of a large-area hot plate specifically designed as a heating and cooling tool for thermal nanoimprint lithography processes. The hot plate has the dimensions 240 mm × 240 mm × 20 mm, in which a series of cartridge heaters and cooling holes are installed. Stainless steel has been selected to endure the high molding pressures. A numerical model based on ANSYS Fluent is employed to predict the thermal behavior of the hot plate in both the heating and cooling phases. The proportional–integral–derivative (PID) thermal control of the device is modeled by adding user defined functions. The results of the numerical computations demonstrate that the use of cartridge heaters provides sufficient heat-up performance and the active liquid cooling in the cooling holes provides the required cool-down performance. However, a crucial technical issue is raised, namely that the proposed design poses a large temperature non-uniformity in the steady heating phase and in the transient cooling phase. As a remedy, a new hot plate in which heat pipes are installed in the cooling holes is considered. The numerical results show that the installation of heat pipes could enhance the temperature uniformity both in the heating and cooling phases.

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“…PFPE is a so material, which can be cross-linked by a low-cost UV-curing process, aer mixing with an UV initiator (see Section 2.2 for details). Con et al 40 discussed that PFPE has a particularly low surface energy that allows the mold release without the use of agents that accelerate its degradation. They The arrows indicate the projection of the ion beam direction.…”

Section: The Two-step Pattern Transfer: Characterization Of the Pfpe mentioning

confidence: 99%

Multiscale structured germanium nanoripples as templates for bioactive surfaces

et al. 2017

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Thermal nanoimprint lithography using fluoropolymer mold

Cited by 21 publications

References 18 publications

Combined soft lithographic transfer‐printing and patterning method of highly fluorinated polymers as a facile surface treatment protocol

Combined soft lithographic transfer‐printing and patterning method of highly fluorinated polymers as a facile surface treatment protocol

Numerical Study on Thermal Design of a Large-Area Hot Plate with Heating and Cooling Capability for Thermal Nanoimprint Lithography

Multiscale structured germanium nanoripples as templates for bioactive surfaces

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