Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers

Riedl, Thomas; Strake, Matthias; Sievers, W.; Lindner, J.

doi:10.1557/opl.2014.312

Cited by 3 publications

(3 citation statements)

References 18 publications

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“…For a triplet of densely packed spheres, the mask opening has a triangular shape. Additionally, modification of the mask, e.g., by thermal or plasma treatment, allows for tailoring of the mask openings and the respective deposition patterns. , …”

Section: Results and Discussionmentioning

confidence: 99%

“…Additionally, modification of the mask, e.g., by thermal or plasma treatment, allows for tailoring of the mask openings and the respective deposition patterns. 37,38 Application of NSL for the intended purpose (Figure 2) starts with the generation of large-area monolayers of polystyrene (PS) spheres on SiO 2 surfaces (silicon wafer with native oxide layer). Via the doctor blade technique, surfaces of several cm 2 are easily covered with uniform sphere monolayers.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

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Easily Accessible Protein Nanostructures via Enzyme Mediated Addressing

et al. 2018

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Site-specific formation of nanoscaled protein structures is a challenging task. Most known structuring methods are either complex and hardly upscalable or do not apply to biological matter at all. The presented combination of enzyme mediated autodeposition and nanosphere lithography provides an easy-to-apply approach for the buildup of protein nanostructures over a large scale. The key factor is the tethering of enzyme to the support in designated areas. Those areas are provided via prepatterning of enzymatically active antidots with variable diameters. Enzymatically triggered protein addressing occurs exclusively at the intended areas and continues until the entire active area is coated. After this, the reaction self-terminates. The major advantage of the presented method lies in its easy applicability and upscalability. Large-area structuring of entire support surfaces with features on the nanometer scale is performed efficiently and without the necessity of harsh conditions. These are valuable premises for large-scale applications with potentials in biosensor technology, nanoelectronics, and life sciences.

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Section: Results and Discussionmentioning

confidence: 99%

Section: ■ Results and Discussionmentioning

confidence: 99%

Easily Accessible Protein Nanostructures via Enzyme Mediated Addressing

et al. 2018

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“…In order to modify the nano-motives from the typically triangular to other shapes one can e.g. tune the nanosphere masks by thermal [8], ion [9] or plasma treatment [10]. One of the key issues in order to exploit nanometric structures on a solid surface in real-world applications is the construction of connections between nanoobjects and their macroscopic environment.…”

Section: Introductionmentioning

confidence: 99%

A template-assisted self-organization process for the formation of a linear arrangement of pairs of metallic tips

Lindner

2014

MRS Proc.

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A novel process for the formation of pairs of opposing metallic nanotips within linear trenches on a silicon wafer is investigated in detail. The process is based on a spreading knife technique typically used in nanosphere lithography to generate monolayers of colloidal polystyrene beads. Here it is applied to initiate self-assembly of spheres in long linear trenches acting as a template for the sphere arrangement. The optimum blade velocity to deposit the spheres selectively and densely packed in the trench depends on the trench surface fraction and can be described by a modified Dimitrov model. It is demonstrated that the spheres can be used as a shadow mask to deposit metallic nanotips in a channel, which are electrically interconnected on each side of the trench, possibly enabling the control and manipulation of nanoobjects in the channel.

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Hierarchical nanopores formed by block copolymer lithography on the surfaces of different materials pre-patterned by nanosphere lithography

2018

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Bottom-up patterning techniques allow for the creation of surfaces with ordered arrays of nanoscale features on large areas. Two bottom-up techniques suitable for the formation of regular nanopatterns on different length scales are nanosphere lithography (NSL) and block copolymer (BCP) lithography. In this paper it is shown that NSL and BCP lithography can be combined to easily design hierarchically nanopatterned surfaces of different materials. Nanosphere lithography is used for the pre-patterning of surfaces with antidots, i.e. hexagonally arranged cylindrical holes in thin films of Au, Pt and TiO2 on SiO2, providing a periodic chemical and topographical contrast on the surface suitable for templating in subsequent BCP lithography. PS-b-PMMA BCP is used in the second self-assembly step to form hexagonally arranged nanopores with sub-20 nm diameter within the antidots upon microphase separation. To achieve this the microphase separation of BCP on planar surfaces is studied, too, and it is demonstrated for the first time that vertical BCP nanopores can be formed on TiO2, Au and Pt films without using any neutralization layers. To explain this the influence of surface energy, polarity and roughness on the microphase separation is investigated and discussed along with the wetting state of BCP on NSL-pre-patterned surfaces. The presented novel route for the creation of advanced hierarchical nanopatterns is easily applicable on large-area surfaces of different materials. This flexibility makes it suitable for a broad range of applications, from the morphological design of biocompatible surfaces for life science to complex pre-patterns for nanoparticle placement in semiconductor technology.

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Thermal Modification of Nanoscale Mask Openings in Polystyrene Sphere Layers

Cited by 3 publications

References 18 publications

Easily Accessible Protein Nanostructures via Enzyme Mediated Addressing

Easily Accessible Protein Nanostructures via Enzyme Mediated Addressing

A template-assisted self-organization process for the formation of a linear arrangement of pairs of metallic tips

Hierarchical nanopores formed by block copolymer lithography on the surfaces of different materials pre-patterned by nanosphere lithography

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