2018
DOI: 10.1109/tdei.2017.007029
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Thermal modeling and calibration in (F)LIMM using an external bias field: Theory and experiment

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Cited by 11 publications
(6 citation statements)
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“…This method is originally proposed by Lang [23] in the 1980s, and the characterization of space charge distribution had been performed under volt-off after external DC voltage application. Recent development has been reported that LIMM measurement is carried out under volt-on [24]. The LIMM is much suitable to clarify the space charge characteristics in a polymer film with only several micrometer thickness, which is a typical thickness of passivation layer on a semiconductor chip.…”
Section: (F)limm Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…This method is originally proposed by Lang [23] in the 1980s, and the characterization of space charge distribution had been performed under volt-off after external DC voltage application. Recent development has been reported that LIMM measurement is carried out under volt-on [24]. The LIMM is much suitable to clarify the space charge characteristics in a polymer film with only several micrometer thickness, which is a typical thickness of passivation layer on a semiconductor chip.…”
Section: (F)limm Methodsmentioning
confidence: 99%
“…Finally, a mathematical treatment allows charge density profile reconstruction in the direction of the sample thickness. A modulated laser beam of a frequency f heating a surface S of a top electrode sputtered on a dielectric nonpolar sample of thickness L, to which an additional DC voltage V ht is applied, the fundamental (F)LIMM equation for the complex current I(f) can be expressed by [24]:…”
Section: (F)limm Methodsmentioning
confidence: 99%
“…Front and back electrodes are connected to the HVDC source and the ammeter respectively. A 100 mW 660 nm modulated laser diode is used in the frequency range from 10 Hz to 10 kHz for space charge measurement using LIMM [18]. Note that LIMM is sensitive near the irradiated electrode (some µm) with a micrometer resolution.…”
Section: Space Charge and Psd Measurementsmentioning
confidence: 99%
“…A RC filter is used to shield and condition the input signal. On the LIMM side [8], a 100 mW 660 nm modulated laser diode is used in the frequency range from 10 Hz to 10 kHz. The back electrode is connected to the switch which, in LIMM mode, connects the electrical protection circuit, the current preamplifier and the lock-in synchronous amplifier.…”
Section: A Coupled Measuring Benchmentioning
confidence: 99%