Thermal flow sensor for liquids and gases based on combinations of two principles

Ashauer, M.; Glosch, H.; Hedrich, F.; Hey, N.; Sandmaier, H.; Lang, Walter

doi:10.1016/s0924-4247(98)00248-9

Cited by 168 publications

(88 citation statements)

References 4 publications

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“…Time-of-flight sensors measure the time that elapses between a heat pulse applied to the heater and the pulse detection by a downstream temperature probe. Sensors based on a combination of multiple principles for extending the operating range have been proposed [7,8].…”

Section: Open Accessmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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Flow sensors are the key elements in most systems for monitoring and controlling fluid flows. With the introduction of MEMS thermal flow sensors, unprecedented performances, such as ultra wide measurement ranges, low power consumptions and extreme miniaturization, have been achieved, although several critical issues have still to be solved. In this work, a systematic approach to the design of integrated thermal flow sensors, with specification of resolution, dynamic range, power consumption and pressure insertion loss is proposed. All the critical components of the sensors, namely thermal microstructure, package and read-out interface are examined, showing their impact on the sensor performance and indicating effective optimization strategies. The proposed design procedures are supported by experiments performed using a recently developed test chip, including several different sensing structures and a flexible electronic interface.

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Section: Open Accessmentioning

confidence: 99%

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Bruschi

Piotto

2012

Micromachines

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“…Although there is no established method for the response time measurements due to the difficulties of realizing generated defined fluidic steps [3], there are reports about measuring the response time. Some of these reports are: Sosna et al [3], Ashauer et al [5], Kohl et al [6] and de Bree et al [7]. In the first one, Sosna et al investigate an electrical measurement of thermal response time and present a model for that measurement.…”

Section: Open Accessmentioning

confidence: 99%

Modeling of the Response Time of Thermal Flow Sensors

2011

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“…Over the last decades, many different thermal flow sensors have been developed for the accurate measurement of gas flows (Van Putten and Middelhoek, 1974;Van Herwaarden and Sarro, 1986;Johnson and Higashi, 1987;Ashauer et al, 1999;Mailly et al, 2001;Ito et al, 2010;Adamec and Thiel, 2010;Ma et al, 2009). A wide range of flow sensors have been developed for different applications, such as automotive, industrial, and medical.…”

Section: Introductionmentioning

confidence: 99%

Investigations into packaging technology for membrane-based thermal flow sensors

Dumstorff

Brauns

Lang

2015

J. Sens. Sens. Syst.

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Abstract.A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown, which is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. In addition, the experimental results are discussed. If a membrane-based thermal flow sensor is not mounted flush with the surface, vortices can occur (depending on velocity and fluid properties) or the reduction in the channel cross section plus a decrease in sensitivity have to be taken into account.

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Thermal flow sensor for liquids and gases based on combinations of two principles

Cited by 168 publications

References 4 publications

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss

Modeling of the Response Time of Thermal Flow Sensors

Investigations into packaging technology for membrane-based thermal flow sensors

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