Thermal flow sensor for liquids and gases

Ashauer, M.; Glosch, H.; Hedrich, F.; Hey, N.; Sandmaier, H.; Lang, Walter

doi:10.1109/memsys.1998.659781

Cited by 36 publications

(18 citation statements)

References 4 publications

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“…Although the properties of the liquids differ significantly, their characteristic curves nearly coincide. On the other hand, measurements with sensor wires perpendicular to the flow channel show deviations of the times ∆t Max of such liquids which are as large as 15-30% [9]. A possible explanation of this observation is that due to different heat conductivity and heat capacity the temperature profile in the flow may be different even if the flow profile should be the same.…”

Section: Experimental Section and Discussionmentioning

confidence: 99%

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Time of Flight Sensor with a Flow Parallel Wire

Gerhardy

Schomburg

2012

Micromachines

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A time of flight sensor has been equipped with a sensing wire parallel to the flow direction (flow parallel wire, FPW). A heat pulse is generated with a coil in the flow channel. The FPW has a center tap allowing its upstream and downstream parts to join in a half bridge. When a heat pulse passes the FPW, a large output peak is generated. The time between heat pulse generation and recording the peak maximum is only marginally affected by the properties of the fluid. With a combination of two FPWs, a measuring range of approximately 0.01-0.5 m/s can be achieved.

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Section: Experimental Section and Discussionmentioning

confidence: 99%

“…However, experiments showed that the measured time of flight was still a function of the fluid [9,10].…”

Section: Introductionmentioning

confidence: 99%

Time of Flight Sensor with a Flow Parallel Wire

Gerhardy

Schomburg

2012

Micromachines

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“…This approach is robust enough to measure particulate flows as well. We remark that thermal flow sensors, based on a 'time of flight' principle, are also possible [88]. In such approaches, a heater generates a short thermal pulse, and a thermal sensor detects the arrival downstream.…”

Section: Discussionmentioning

confidence: 99%

Charge-induced clustering in multifield particulate flows

Zohdi

2005

Int. J. Numer. Meth. Engng

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SUMMARYThe present work extends recent results in Zohdi (Int. J. Solids Struct., in press; Proc. Roy. Soc., in press) to develop models and robust solution strategies for the direct simulation of the dynamical flow of charged particles undergoing simultaneous contact, surface reactions and heat transfer. Emphasis is placed on the possibility of particle clustering which can lead to the formation of cluster-structures within the particulate flow. A recursive 'staggering' solution scheme is developed, whereby the timesteps are adaptively adjusted to control the rates of convergence within each time-step, and hence, the error associated with the incomplete resolution of the coupled interaction between the various fields and associated constraints. Representative numerical simulations are provided in order to illustrate the character of the model and the solution strategy.

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“…One of the examples of its application is for the liquid flow rate measurement (Lammerink et al 1993, Lammerink et al 1996, Ashauer et al 1998 including the micro-machined thermal sensors for measuring liquid flow rates in the nanoliter-per-minute range (Wu et al 2001). This MEMS flow sensor is generally needed to replace existing commercial sensors that are proven to be inadequate for some applications, such as the micro-chromatography, biochemical detection, and mass spectrometry purpose because of their limited sensitivity, large size, high dead volume, and difficulties in interfacing with microfluidic devices.…”

Section: Introductionmentioning

confidence: 99%

Review of MEMS flow sensors based on artificial hair cell sensor

et al. 2011

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An artificial hair cell sensor is the current technology based on a biological inspiration and is widely used in underwater applications including the glider, robotic and autonomous surface vehicle. These papers discuss a few strategies in relation to the principles of sensing, fabrication, performance, and preliminary measurement data. The MEMS flow sensor is generally needed to replace existing commercial sensors that are inadequate for some applications. Material also provides some advantages to the hair cell sensor. Some materials such as Polydimethylsilaxone and Polyurethane have been investigated. The sensing element is reviewed including the doped piezoresistors, strain gauge and force sensitive resistors. Performance and result of each design will be presented briefly. Finally, the importance and the need for modeling, simulation and experiments will be reviewed based on the latest achievements on that particular research area.

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Thermal flow sensor for liquids and gases

Cited by 36 publications

References 4 publications

Time of Flight Sensor with a Flow Parallel Wire

Time of Flight Sensor with a Flow Parallel Wire

Charge-induced clustering in multifield particulate flows

Review of MEMS flow sensors based on artificial hair cell sensor

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