The ruggedness of SiC pn diode was investigated. The SiC pn diode was confirmed to operate at over 800 O C, a higher temperature than Si device's destruction temperature, and to endure a large current of over 1000A (2000A/cm 2 ) per one chip. The resistance of the diode showed a positive temperature coefficient until its destruction. This was different from the destruction of Si pn diodes.Index Terms--intrinsic carrier density, negative temperature coefficient resistor, SiC pn diode, surge current ruggedness