2006
DOI: 10.1103/physrevb.74.195310
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Thermal dissociation and desorption ofPH3on Si(001): A reinterpretation of spectroscopic data

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Cited by 64 publications
(77 citation statements)
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“…Extensive theoretical modeling 19,[28][29][30][31][32][33] in conjunction with detailed STM images provided a consistent interpretation of the first stage of this reaction, namely the thermal dissociation of PH 3 into phosphorus and hydrogen adatoms. However, the subsequent incorporation reactions that take phosphorus adatoms into the surface remain unclear.…”
Section: Introductionmentioning
confidence: 82%
See 1 more Smart Citation
“…Extensive theoretical modeling 19,[28][29][30][31][32][33] in conjunction with detailed STM images provided a consistent interpretation of the first stage of this reaction, namely the thermal dissociation of PH 3 into phosphorus and hydrogen adatoms. However, the subsequent incorporation reactions that take phosphorus adatoms into the surface remain unclear.…”
Section: Introductionmentioning
confidence: 82%
“…The temperature at which hydrogen is observed to diffuse is also 650 K. 33,53 The similarity of these temperature requirements suggests that hydrogen diffusion is the rate-determining process in the experimental setting. We postulate that hydrogen must diffuse away from the phosphorus adatom and create space to allow incorporation, thereby reconciling our low incorporation barrier with the experimental findings.…”
Section: Discussionmentioning
confidence: 99%
“…1d,e), which can accommodate a maximum of four P donors (see Supplementary Fig. S1 and Supplementary Methods) 11 . Two possible configurations of these four donors are shown by the white circles.…”
mentioning
confidence: 99%
“…Annealing at 350 C causes one fragment to leave the surface and the remaining PH 2 fragment transitions to an Si-P heterodimer. 20 The large exposed areas of the silicon surface that define the SET, reservoir, and gate electrodes are also phosphorus doped and annealed, resulting in metallic conduction 21 with a carrier density…”
mentioning
confidence: 99%