2003
DOI: 10.1016/s0968-4328(03)00024-6
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Thermal diffuse scattering in sub-angstrom quantitative electron microscopy—phenomenon, effects and approaches

Abstract: This paper reviews the recent progress in the following areas.(1) In quantitative high-resolution transmission electron microscopy, the theoretically calculated images usually give better contrast than the experimentally observed ones although all of the factors have been accounted for. This discrepancy is suggested due to thermal diffusely scattered (TDS) electrons, which were not included in the image calculation. The contribution from TDS electrons is especially important if the image resolution is approach… Show more

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Cited by 51 publications
(31 citation statements)
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“…Image simulation in this study did not take thermal diffuse scattering (TDS) into consideration. Temperature factors of oxygen atoms in the monoclinic crystal system are comparatively large 13 so that the decreases in the amplitude of the exit wave function due to TDS 26 may not be negligible in the NCS imaging mode, which utilizes additional amplitude contrast. Moreover, amplitude contrast also affected the contrast inside the nano-channels.…”
Section: Resultsmentioning
confidence: 99%
“…Image simulation in this study did not take thermal diffuse scattering (TDS) into consideration. Temperature factors of oxygen atoms in the monoclinic crystal system are comparatively large 13 so that the decreases in the amplitude of the exit wave function due to TDS 26 may not be negligible in the NCS imaging mode, which utilizes additional amplitude contrast. Moreover, amplitude contrast also affected the contrast inside the nano-channels.…”
Section: Resultsmentioning
confidence: 99%
“…While the diffuse spots, indicated by arrows in Fig. 2c and d, are crossovers from strongly scattered electrons from Brillouin zone boundaries, which may be associated with thermally scattered electrons [19]. The L1 2 ordering reflections in the as-spun sample (Fig.…”
Section: Microstructure Of the As-spun And Annealed Samplesmentioning
confidence: 89%
“…An exact solution which is computationally much more demanding has been given by Wang [2]. Figure 3a shows the TDS intensity in the object exit plane at a specimen thickness of 20 nm obtained for InSb by the FP method by computing 500 wave functions corresponding to different thermal displacement configurations, excluding Bragg reflections from the Fourier-transformed wave functions, inverse Fourier transform, and finally summing the resulting TDS intensities.…”
Section: An Approximation To Compute Tds-intensities For Parallel Illmentioning
confidence: 99%
“…3c. In our approach, we apply the MS method and use the TDS scattered intensity generated at position R in the exit surface of slice m as given by the integrand in equation (2). A point source with intensity one is put at position R which is assumed incoherent with respect to all other point sources generating TDS intensity.…”
Section: An Approximation To Compute Tds-intensities For Parallel Illmentioning
confidence: 99%
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