We present a first-principles study of the cross-plane thermal conductivity κ ⊥ in a wide variety of semiconductor thin films. We introduce a simple suppression model that matches variance-reduced Monte Carlo simulations with ab-initio phonon dispersions and scattering rates within ≤ 5% even for anisotropic compounds. This, in turn, enables accurate κ ⊥ reconstruction from tabulated cumulative conductivity curves κΣ(Λ ⊥ ). We furthermore reveal, and explain, a distinct quasiballistic regime characterised by a fractional thickness dependence κ ⊥ ∼ L 2−α in alloys (where α is the Lévy exponent) and logarithmic dependence κ ⊥ ∼ ln(L) in single crystals. These observations culminate in the formulation of two compact parametric forms for κ ⊥ (L) that can fit the first-principles curves across the entire ballistic-diffusive range within a few percent for all investigated compounds.Phonon-mediated heat conduction in thin films plays an important role in nanoscale devices [1, 2] and received increasing theoretical attention [3][4][5][6][7][8][9][10]. Interestingly, cross-plane thermal transport has posed a considerably harder challenge than its in-plane counterpart. An exact solution of the Boltzmann transport equation (BTE) in cross-plane geometries has been obtained only very recently [7] and provides the film conductivity at thickness L as an integral over phonon frequencyHere S is a 'suppression function' that contains the thin film physics and κ(ω) denotes the bulk spectral conductivity. Evaluation of the latter often relies on analytical models with isotropic dispersions [8-10] for mathematical convenience. More realistic phonon spectra can also be utilised through frequency binning, but this procedure becomes problematic in anisotropic compounds. In this work, we adopt a first-principles framework [11,12] that goes well beyond the predictive power of spectral formulations. We subsequently show that the resulting cross-plane thin film conductivity curves κ(L) can be captured by compact models that effortlessly maintain their accuracy in anisotropic compounds. In the process, we also reveal quasiballistic regimes in both alloys and single crystals with distinct film thickness dependences.We performed our ab-initio study for a variety of semiconductors selected for their technological relevance. Thin Si films play a key role in silicon-on-insulator de- We calculated ab-initio heat capacities C( k), group velocities v( k) and scattering rates τ −1 ( k) using the procedure described in Ref. 17. The adopted method has been tested on a variety of bulk compounds and provides results in good agreement with experiments [11]. Phonon properties are resolved over a uniform wavevector grid with N 3 k points, where we have set N k to 24 for diamond/zincblende crystals, 16 for wurtzites and 12 for Pnma SnSe. Scattering rates τ −1 = τ −1 anh + τ −1 har and mean free paths (MFPs) Λ = v τ account for anharmonic (three-phonon) and harmonic (isotope/alloy) scattering mechanisms. Alloys were treated under the virtual crystal approxim...