Thermal conductivity of nano- and micro-crystalline diamond films studied by photothermal excitation of cantilever structures

Saturday, Leo; Wilson, L. L.; Retterer, Scott T.; Evans, Nicholas; Briggs, Dayrl P.; Rack, Philip D.; Lavrik, Nickolay

doi:10.1016/j.diamond.2021.108279

Cited by 9 publications

(3 citation statements)

References 33 publications

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“…Other thermomechanical properties, such as thermal diffusivity and thermal conductivity of diamond nanocrystalline and microcrystalline structures, have been studied by photothermal excitation, which induces surface stress on a bimaterial cantilever. 107 Regarding the mechanical properties of polymer brushes, to establish a direct correlation between the molecular structure and the swelling that these kinds of polymers undergo, microcantilever sensors have been applied alternatively. [108][109][110][111] Attractive interactions between polymers in a brush lead to a positive bending of the cantilever, while solvent incorporation due to the swelling causes compressive stress and, consequently, the cantilever bends away from the coated side.…”

Section: Characterization Of Mechanical and Thermal Propertiesmentioning

confidence: 99%

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Beyond biology: alternative uses of cantilever-based technologies

2023

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Section: Characterization Of Mechanical and Thermal Propertiesmentioning

confidence: 99%

Section: Microcantilever-based Devices: Applicationsmentioning

confidence: 99%

Beyond biology: alternative uses of cantilever-based technologies

2023

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“…[41] With ongoing researches and advancements in MCD deposition techniques and microfabrication methods, the utilization of MCD in MEMS applications are greatly broadened and developed. The applications of MCD MEMS devices are across a wide range of applications, mainly including sensing, [73][74][75] RF MEMS, [76] microfluidics, [77][78][79] and optics. [80,81] MCD MEMS device were developed for sensors and actuators, such as pressure sensing, gas sensing, and gyroscopes.…”

Section: Micro-crystalline Diamond-based Mems Devicesmentioning

confidence: 99%

Diamond MEMS: From Classical to Quantum

Sun,

Zhang,

Liu

et al. 2023

Adv Quantum Tech

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Diamond has numerous outstanding properties in mechanics, physics, chemistry, electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical systems (MEMS/NEMS) devices or hybrid quantum MEMS/NEMS systems. The extremely high mechanical strength and the ultra‐wide bandgap energy enable the development of mechanically and thermally robust MEMS/NEMS sensors and switches, while the long coherence time of spin defects center enables the reading out through optical methods, precise quantum sensing, and quantum information processing. In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

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