1965
DOI: 10.1103/physrev.140.a2014
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Thermal Conductivity of Electron-Irradiated Silicon

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Cited by 12 publications
(2 citation statements)
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“…31͒, and the solid line represents measurements of a sample with a higher defect concentration. 32 These results by Vook et al, measured on a sample that has been irradiated with electrons, fit very well to our data. We have to assume that a rather high defect concentration has been introduced in the Si wafer by preparation of the wafer, e.g., sawing and polishing.…”
Section: Fem Calculationssupporting
confidence: 91%
See 1 more Smart Citation
“…31͒, and the solid line represents measurements of a sample with a higher defect concentration. 32 These results by Vook et al, measured on a sample that has been irradiated with electrons, fit very well to our data. We have to assume that a rather high defect concentration has been introduced in the Si wafer by preparation of the wafer, e.g., sawing and polishing.…”
Section: Fem Calculationssupporting
confidence: 91%
“…This significantly reduces the mean free path of the phonons to the same amount as for the irradiated sample used in Ref. 32. Unfortunately, we did not find any other comparable heat conductivity data for Si thin films in the literature.…”
Section: Fem Calculationsmentioning
confidence: 75%