2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) 2023
DOI: 10.1109/mems49605.2023.10052214
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Thermal Conductivity Detector (TCD)-Type Gas Sensor Based on the Suspended 1D Nanoheater for IoT Applications

Wootaek Cho
1
,
Jong-Hyun Kwak
2
,
Taejung Kim
3
et al.
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