Thermal characterization of thin films: A chip-based approach for in-plane property analysis
Hanfu Wang,
Ziqi Liang,
Junhui Tang
et al.
Abstract:Accurate measurement of thermal properties in thin films is crucial for optimizing devices and deepening our understanding of heat transfer at nano and micro scales. This study presents a combined experimental and computational investigation on a chip-integrated technique for the assessment of in-plane thermal properties of thin films. This method stands out by incorporating inherent error cancelation to lessen the impact of radiative heat loss and allows simultaneous, independent determination of both thermal… Show more
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