Thermal and temporal stability of V/Sc multilayer mirror for the soft X-ray water window region

Yi, Qiang; Huang, Qiushi; Zhang, Jinshuai; Wang, Xiangmei; Qi, Runze; Zhang, Zhong; Xu, Rongkun; Taiping, Peng; Jonnard, Philippe; Giglia, Angelo; Wang, Zhanshan

doi:10.1016/j.vacuum.2017.09.030

Cited by 4 publications

(2 citation statements)

References 26 publications

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“…A high-reflective multilayer mirror is a vital component for extreme ultraviolet and soft X-ray based instrumentation used in lithography and microscopy, X-ray lasers, plasma physics, and astrophysics, synchrotron radiation polarimetry etc., and during the last decade this field has experienced significant growth (Kopylets et al, 2019;Qi et al, 2019;Pradhan et al, 2018;Huang et al, 2016Huang et al, , 2017aPanini et al, 2017;Peng et al, 2016;Li et al, 2013;Ferná ndez-Perea et al, 2013;Yi et al, 2017;Harrison et al, 2013). In particular, the development of high-reflective normal-incidence multilayer (ML) optics for the water window region ( ' 2.3-4.4 nm), where water is transmissive but carbon-based organic materials show strong absorption, has acquired great interest.…”

Section: Introductionmentioning

confidence: 99%

Interface modification of Cr/Ti multilayers with C barrier layer for enhanced reflectivity in the water window regime

et al. 2021

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The influence of a carbon barrier layer to improve the reflectivity of Cr/Ti multilayers, intended to be used in the water window wavelength regime, is investigated. Specular grazing-incidence X-ray reflectivity results of Cr/Ti multilayers with 10 bilayers show that interface widths are reduced to ∼0.24 nm upon introduction of a ∼0.3 nm C barrier layer at each Cr-on-Ti interface. As the number of bilayers increases to 75, a multilayer with C barrier layers maintains almost the same interface widths with no cumulative increase in interface imperfections. Using such interface-engineered Cr/C/Ti multilayers, a remarkably high soft X-ray reflectivity of ∼31.6% is achieved at a wavelength of 2.77 nm and at a grazing angle of incidence of 16.2°, which is the highest reflectivity reported so far in the literature in this wavelength regime. Further investigation of the multilayers by diffused grazing-incidence X-ray reflectivity and grazing-incidence extended X-ray absorption fine-structure measurements using synchrotron radiation suggests that the improvement in interface microstructure can be attributed to significant suppression of inter-diffusion at Cr/Ti interfaces by the introduction of C barrier layers and also due to the smoothing effect of the C layer promoting two-dimensional growth of the multilayer.

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Section: Introductionmentioning

confidence: 99%

Interface modification of Cr/Ti multilayers with C barrier layer for enhanced reflectivity in the water window regime

et al. 2021

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“…For imaging purpose at near-normal incidence, the Cr/Sc system 3,4 , with or without thin diffusion barrier layers, as well as other systems [5][6][7][8] , have been developed. We are here interested for the spectroscopic purpose in the range of the nitrogen K emission band.…”

Section: Introductionmentioning

confidence: 99%

Characterization of Sc/Mg multilayers with and without Co barriers layers for x-ray spectroscopy in the water window range

Jonnard

Guen

et al. 2019

Journal of Applied Physics

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We characterize nano-scale periodic Sc/Mg two-layer, Sc/Mg/Co tri-layers and Sc/Co/Mg/Co quadri-layer designed as dispersive elements for x-ray spectroscopy in the nitrogen K range (390 eV). The samples are prepared by magnetron sputtering with Mg and Sc layers being a few nanometers thick and Co layers being of sub-nanometric thickness. We apply nondestructive (x-ray reflectivity and x-ray fluorescence in standing wave mode) and destructive (transmission electron microscopy) techniques to obtain a relevant description of the deposited stacks. It turns out that a strong interdiffusion takes place in the two-layer leading to poor reflective properties. Interdiffusion also occurs in the tri-layers and quadri-layer but between the Sc and Co layers. These systems can be considered as periodic ScCo/Mg two-layers with well-defined layers. As a consequence, the Sc/Co/Mg/Co multilayer is found interesting to use for spectroscopy as a reflectance of 32% is expected in the N K range in the water window range.

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Constitutive Modelling and Processing Map of GH3128 Superalloy during Hot Deformation

Wang

Gao

et al. 2022

J. of Materi Eng and Perform

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Thermal and temporal stability of V/Sc multilayer mirror for the soft X-ray water window region

Cited by 4 publications

References 26 publications

Interface modification of Cr/Ti multilayers with C barrier layer for enhanced reflectivity in the water window regime

Interface modification of Cr/Ti multilayers with C barrier layer for enhanced reflectivity in the water window regime

Characterization of Sc/Mg multilayers with and without Co barriers layers for x-ray spectroscopy in the water window range

Constitutive Modelling and Processing Map of GH3128 Superalloy during Hot Deformation

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