Theory and Technology of The Single-Probe Two-Step Method to Separate Error

Zhang, Lei; Li, Tong; Ding, Jian; Yang, Xiaobing

doi:10.21307/ijssis-2017-540

Cited by 2 publications

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The calibration of standard reference artifact that is used in the accuracy verification of roundness instrument is also very an important requirement. Therefore, the validation accuracy of software strategies for measuring machine becomes very important [1][2].…”

Section: Introductionmentioning

confidence: 99%

Method of Optimal Measurement Strategy for Ultra-High-Precision Machine in Roundness Nanometrology

Ali

2015

International Journal on Smart Sensing and Intelligent Systems

View full text Add to dashboard Cite

Abstract-Talyrond-TR is a modern sensitive instrument in nanometrology. The performance ofTalyrond-TR machine is very important to find an optimal result in roundness measurement. In this paper, the experimental evaluation method of Talyrond-TR 73 Experimental results revealed that the lowest deviation in roundness has been investigated by using MZ reference algorithm. The average of total roundness indicates low deviation by about 65.6% and 57.3% at using 2CR-and Gaussian-filter respectively, which proved the machine reliability within application range. Furthermore, the evaluation method was performed experimentally to establish reference data sets for circular, cylindrical and spherical objects. The sets of established data at different strategic parameters have been postulated to satisfy the ability of the proposed method to correlate the roundness measurements within the application range. The experimental result ensures that the proposed evaluation method is reliable and effective. Moreover, expanded uncertainty in measurement has been estimated and confirmed the degree of confidence for the proposed method.

show abstract

Section: Introductionmentioning

confidence: 99%