A quantitative study on inelastic
electron scattering with a molecule
is of significant importance for understanding the essential mechanisms
of electron-induced gas-phase and surface chemical reactions in their
excited electronic states. A key issue to be addressed is the quantitatively
detailed inelastic electron collision processes with a realistic molecular
target, associated with electron excitation that leads to potential
ionization and dissociation reactions of the molecule. Using the real-time
time-dependent density functional theory (TDDFT) modeling, we present
quantitative findings on the energy transfers and internal excitations
for the low energy (up to 270 eV) electron wave packet impact with
the molecular target cobalt tricarbonyl nitrosyl (CTN, Co(CO)3NO) that is used as a precursor in electron-enhanced atomic
layer deposition (EE-ALD) growth of Co films. Our modeling shows the
quantitative dependence of the wave packet sizes, target molecule
orientations, and impact parameters on the energy transfer in this
inelastic electron scattering process. It is found that the wave packet
sizes have little effect on the overall profile of the internal multiple
excited states, whereas different target orientations can cause significantly
different internal excited states. To evaluate the quantitative prediction
capability, the inelastic scattering cross-section of a hydrogen atom
is calculated and compared with the experimental data, leading to
a constant scaling factor over the whole energy range. The present
study demonstrates the remarkable potential of TDDFT for simulating
the inelastic electron scattering process, which provides critical
information for future exploration of electronic excitations in a
wide range of electron-induced chemical reactions in current technological
applications.