The controlled growth of vertical van der Waals (vdW)
heterostructures
based on two-dimensional (2D) single crystals is crucial for the energy
band modulation of 2D materials and related device applications. In
this study, we investigated the epitaxial intercalation method to
directly grow large-area hexagonal boron nitride (hBN)/graphene stacked
vdW heterostructures on commercial copper foils. The method consists
of three steps: growth of the top hBN template, hydrogen termination
of the hBN edge, and intercalation growth of graphene between the
hBN and a copper catalyst. In the intercalation step, compared with
the conventional use of methane, a precursor with a lower hydrogen
content, such as acetylene, is beneficial in maintaining the integrity
of the hBN template. The ratio of hydrogen to acetylene determines
the crystallization and quality of the intercalated graphene and hBN/graphene
heterostructures. With our epitaxial intercalation method, we extend
the bottom-up fabrication of large-scale high-quality vdW heterostructures.