We have studied the growth and transport of hydrogenated Si clusters in a vacuum system which has a cluster growth chamber consisting of an ion trap, a mass-selection chamber, and a cluster deposition chamber. The grown clusters were analyzed by mass spectrometers at three different positions along the cluster path. The results showed that Si 6 H + x (n = 1, 7, 13) cations were always observed. Of these, the clusters with x = 13 were the most stable, having a structure that corresponded to a ring structure with bulk-like sp 3 bonding. The grown clusters were extracted as an ion beam from the ion trap through the inside of the quadrupole in the ion trap. The cluster ions extracted were mass-selected and were deflected by a quadrupole lens out of the path of the effusive flow from the cluster growth chamber. The cluster ion beam was slowed to a deposition energy of 1 ∼ 100 eV/atom and focused on the sample surface. It was confirmed that the characteristics of the cluster ion beam were controlled by the growth parameters in the ion trap.The deposition of clusters of a few to several hundreds of atoms on solid surfaces has been studied recently both because of the interest in structures and properties of materials with reduced size and because of the possibility of technological applications. Nanostructures are formed when clusters of a specified structure are arranged on solid surfaces. The thin film consisting of well-defined clusters is also expected to exhibit new types of material characteristics. It is especially desirable to investigate semiconductor clusters, since changes in material characteristics with size have been realized dramatically in semiconductors. Much effort has been expended in this direction. Most of the work, however, concerns metal clusters [1][2][3][4][5].The recent development of an ion trap for cluster growth has made it possible to obtain well-controlled growth of semiconductor clusters [6]. It has already been demonstrated that * Permanent address: Electrotechnical Laboratory, Tsukuba 305, Japan hydrogenated silicon clusters can be grown from silane gas in the ion trap [7].Si clusters are known to have entirely different structures from those due to bulk-like sp 3 bonding. This arises because of the presence of dangling bonds, which makes it inadequate to use Si clusters to investigate how the properties vary with size. The addition of hydrogen atoms possibly restores the sp 3 nature, allowing us to investigate the genuine dependence on the cluster size. The typical hydrogenated Si cluster, Si 6 H 13 , is the smallest network of Si atoms that fulfills the sp 3 bonding nature.We have developed an instrument for scanning tunneling microscopy (STM) observation of surfaces, onto which wellcontrolled clusters are deposited in ultrahigh vacuum (UHV). This makes it possible to deposit well-controlled Si clusters on Si surfaces, which are expected to exhibit novel characteristics as semiconductor materials. Prior to STM observation, in this paper we investigate the growth characteristics of the...