Abstract:A compact nanosensor that explores the tie-in between stress-induced deformation and optical resonance characteristics is theoretically proposed for pressure sensing. The structure modeling, electromagnetic (EM) wave simulation, and performance evaluations were carried out using the 2D finite element method (FEM). The proposed surface plasmon resonance (SPR) based metal-insulator-metal (MIM) model responds to the pressure induced on the top-facing side of an Ag concave square ring-square disc arrangement (Conc… Show more
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