Theoretical expression for clean air volume in cleanrooms with non-uniform environments

Progress and prospect of research on the non-uniform indoor environment

“…The result shows that the required ventilation rate with the advanced air distribution is 21.3% lower than the nominal ventilation rate, while the required ventilation rate with a poor air distribution is significantly higher than the nominal ventilation rate, as shown in Figure 3. 15 Furthermore, Zhao et al 18 applied the idea of a nonuniform environment to semiconductor fabs to reduce the circulating air volume. The particle in the cleanroom was found to be passively transported, and the ventilation rate expression that satisfies the cleanliness level was derived to direct the airflow design.…”

“…personnel) to the target zone is greatly decreased, and the required air volume is reduced by 67.3%, which results in significant energy savings. 18 The equation of the ventilation rate in a non-uniform environment shows both the intensity and position which is important to the accessibility of the contaminant source, that can have a significant influence on the ventilation rate, so the information of sources is critical when creating an efficient non-uniform environment. Scholars have proposed a variety of methods to identify the location and intensity of pollution sources.…”

“…Furthermore, Zhao et al 18 applied the idea of a non-uniform environment to semiconductor fabs to reduce the circulating air volume. The particle in the cleanroom was found to be passively transported, and the ventilation rate expression that satisfies the cleanliness level was derived to direct the airflow design.…”

“…personnel) to the target zone is greatly decreased, and the required air volume is reduced by 67.3%, which results in significant energy savings. 18…”

Numerical Investigation of using FDCU on Temperature Distribution in Non-Unidirectional Cleanrooms

“…Milberg et al, [20] noticed that as the air turbulence increased from 1 to 10%, the number of larger particles (>0.33 pm) deposited on the surfaces was increased by 39% and 46%. Zhao et al, [21] derived a theoretical expression for the clean air volume in a nonuniform cleanroom environment by treating particle transport as passive transport and utilising the accessibility index to define the effect of particle sources on the clean zone.…”