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1991
DOI: 10.1541/ieejeiss1987.111.9_390
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Theoretical Determination of Equivalent Circuit Parameters for Double Electrode SAW Interdigital Transducers

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Cited by 3 publications
(7 citation statements)
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“…Figure 2 shows the results of FEM calculations [14] of the reflection coefficient per electrode, the SAW phase velocity, and the electromechanical coupling factor in a configuration formed with the electrode on top of 42°Y X-LiTaO 3 . 1(a) and 1(d).…”
Section: Theoretical Calculationsmentioning
confidence: 99%
See 1 more Smart Citation
“…Figure 2 shows the results of FEM calculations [14] of the reflection coefficient per electrode, the SAW phase velocity, and the electromechanical coupling factor in a configuration formed with the electrode on top of 42°Y X-LiTaO 3 . 1(a) and 1(d).…”
Section: Theoretical Calculationsmentioning
confidence: 99%
“…1(a) and 1(d), the SAW characteristics vary depending on whether the electrode is on top of the substrate or is embedded in a groove, and the characteristics are also dependent on the electrode material and the film thickness. Figure 2 shows the results of FEM calculations [14] of the reflection coefficient per electrode, the SAW phase velocity, and the electromechanical coupling factor in a configuration formed with the electrode on top of 42°Y X-LiTaO 3 . The results other than the reflection coefficient in Fig.…”
Section: Theoretical Calculationsmentioning
confidence: 99%
“…Figure 1 shows the configurations of various electrodes formed on a substrate and in a substrate of 10° rotated YX-LiNbO 3 , based on an analysis [13,14] using the finite element method (FEM). We fabricated a SAW resonator using a Cu electrode and confirmed that the configuration with an embedded electrode yielded greater bandwidth.…”
Section: Introductionmentioning
confidence: 99%
“…We fabricated a SAW resonator using a Cu electrode and confirmed that the configuration with an embedded electrode yielded greater bandwidth. Figures 2 to 5 show the electromechanical coupling factor for the electrodes and the reflection coefficient [13][14][15] at one finger in the shorted electrode. In the BPF type, a 6.8% variable range was obtained in a tunable filter formed with a fixed capacity on a substrate instead of a variable capacity.…”
Section: Introductionmentioning
confidence: 99%
“…1 shows a dependence of electro-mechanical coupling factor on (a) a conventional structure of a Cu electrode on 4°Y-X·LiNbO 3 and (b) a structure of a grooved Cu-electrode /4°Y-X·LiNbO 3 as a function of the Cu thickness. The coupling factor was calculated by using FEM [6] [7]. Broken and solid lines show LSAW and Love wave without the leaky component, respectively, in Fig.1.…”
Section: Introductionmentioning
confidence: 99%