Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

Shimizu, Yuki; Ishida, Ayaka; Matsukuma, Hiraku; Gao, Wei

doi:10.1109/amcon.2018.8614751

2018 IEEE International Conference on Advanced Manufacturing (ICAM) 2018

DOI: 10.1109/amcon.2018.8614751

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Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

Yuki Shimizu

Ayaka Ishida

Hiraku Matsukuma

et al.

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Theoretical calculation of the reading output from a micro thermal sensors for precision positioning

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