Theoretical approximations for depth resolution calculations in IBA methods

Szilágyi, E.; Pászti, F.; Amsel, G.

doi:10.1016/0168-583x(95)00186-7

Cited by 174 publications

(79 citation statements)

References 24 publications

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“…In general, the spectra for nanoparticles have larger energy-loss variations in comparison to uniform films. These effects, also called structured-induced energy spread, 30 lead to an energy spectrum with a rounded maximum ͑no plateau is observed͒. Of course, these differences can be observed as long as the electronic energy-loss straggling is not too large.…”

Section: Resultsmentioning

confidence: 99%

Characterization of nanoparticles through medium-energy ion scattering

Sortica

Grande

Machado

et al. 2009

Journal of Applied Physics

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In this work we review the use of the medium-energy ion scattering ͑MEIS͒ technique to characterize nanostructures at the surface of a substrate. We discuss here how the determination of shape and size distribution of the nanoparticles is influenced by the energy loss at the backscattering collision, which leads to an asymmetrical energy-loss line shape. We show that the use of a Gaussian line shape may lead to important misinterpretations of a MEIS spectrum for nanoparticles smaller than 5 nm. The results are compared to measurements of gold nanoparticles adsorbed on a multilayered film of weak polyelectrolyte.

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Section: Resultsmentioning

confidence: 99%

Characterization of nanoparticles through medium-energy ion scattering

Sortica

Grande

Machado

et al. 2009

Journal of Applied Physics

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“…Geometrical spread is caused by the nite sizes of detector aperture and beam spot and results in a spread of exit and reaction angles [18,Section 4.2]. The spread of exit angles causes path length di erences for emerging particles, thus resulting in energy spread, while the spread of reaction angles results in kinematic energy spread.…”

Section: Deuterium In Carbonmentioning

confidence: 99%

“…Energy-loss straggling in the target and stopper foils, energy spread due to multiple scattering in target and foil, geometrical spread due to nite beam size and detector aperture, and detector resolution were taken into account [21,18]. SRIM-2003 stopping powers [22] and crosssection data from [15] were used.…”

Section: Depth Resolution Calculation and Computer Simulationmentioning

confidence: 99%

Quantitative depth profiling of deuterium up to very large depths

Mayer

Gauthier

Sugiyama

et al. 2009

Nuclear Instruments and Methods in Physics Research Section B:

132

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Quantitative depth pro les of deuterium up to very large depths are achieved from the energy spectra of protons created by the D( 3 He,p)α nuclear reaction at incident energies up to 6 MeV. The advantages of this method compared to the more often applied resonance method are discussed. For light target materials the achievable depth resolution is mainly limited by geometrical spread due to the nite size of the detector aperture, while for heavy materials the resolution is mainly limited by multiple small-angle scattering. A reasonable depth resolution throughout the whole analyzed depth can be obtained by using several di erent incident energies. Depth pro ling up to 38 µm is demonstrated for a-C:D layers deposited on the limiter of Tore Supra, and up to 7.5 µm in tungsten coatings from the divertor of ASDEX Upgrade.

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“…7a for instance, how much of the tailing of the oxygen profile for example, is due to energy spread effects and how much is due to native oxygen impurity in the Ti target source. Given a surface depth resolution of 64 Â 10 15 at.cm À2 for oxygen atoms, an edge width of about 100 Â 10 15 at.cm À2 at the first (topmost) interface seems to sug-gest considerable energy spread effects, notably multiple scatter-ing [30]. Unfortunately with the given limitation in the energy resolution of the detector system, and the fact that other energy spread effects are not taken into account in the calculation, no concrete elucidation of the interfacial structure can be reliably obtained from the depth profiles as they are.…”

Section: Konzerd Calculation Of Depth Profilesmentioning

confidence: 99%

The new Heavy Ion ERDA set up at iThemba LABS Gauteng: Multilayer thin film depth profiling using direct calculation and Monte Carlo simulation codes

Msimanga

Wamwangi

Comrie

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

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We report here on the recently built Heavy Ion ERDA set up at iThemba LABS Gauteng; describing a typ-ical application in the study of interfacial reactions in an Al 2 O 3 -Ti ceramic-metal multilayer structure annealed in vacuum at 800 °C for 2 h. Depth profile extraction was found to be best obtained through combined use of direct calculation and Monte Carlo simulation codes as opposed to using just either of the methods. The obtained profile suggests a case of the Kirkendall effect, whereupon the inter-diffu-sion between the metal and the ceramic was largely due to the faster diffusion of the metal into the amor-phous ceramic than diffusion of the ceramic elements into the metallic layer.

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Theoretical approximations for depth resolution calculations in IBA methods

Cited by 174 publications

References 24 publications

Characterization of nanoparticles through medium-energy ion scattering

Characterization of nanoparticles through medium-energy ion scattering

Quantitative depth profiling of deuterium up to very large depths

The new Heavy Ion ERDA set up at iThemba LABS Gauteng: Multilayer thin film depth profiling using direct calculation and Monte Carlo simulation codes

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