Theoretical and finite element analysis of dynamic deformation in resonating micromirrors

Farrugia, Russell; Grech, Ivan; Camilleri, Duncan; Casha, Owen; Gatt, Edward; Micallef, Joseph

doi:10.1007/s00542-017-3335-7

Cited by 11 publications

(2 citation statements)

References 16 publications

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“…1 consist of a circular mirror plate suspended from an inner frame by four links, geometrically optimized for the reduction of δdyn at the torsional resonant mode. At the scan angle amplitude, θmax (= θopt/4) a normalized maximum dynamic deformation, Rmax [8] of 0.096 is predicted from structural FE simulations, inline with the best-published results for single-layer resonant micro-scanners [11] [12].…”

Section: IIIsupporting

confidence: 75%

Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

Farrugia

Portelli

Grech

et al. 2020

2020 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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In this paper, we present the design and comparative analysis of two high frequency resonant micromirrors which incorporate direct and indirect electrostatic drive configurations. Innovative claims include: (1) the implementation of high fidelity fluid-structural coupled damping simulations in the design optimization process of indirect drive micro-mirrors; (2) demonstration of an optimized single-Si layer design that maximizes scanning efficiency while achieving minimal mirror dynamic deformation, δdyn. A total optical scan angle, θopt, of 37° at a scanning frequency, fs, of 25 kHz and a sinusoidal drive voltage amplitude, Vdrive of 200 V is achieved by the 1 mm-diameter, D, indirect drive micromirror design.

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Section: IIIsupporting

confidence: 75%

Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

Farrugia

Portelli

Grech

et al. 2020

2020 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

Self Cite

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“…Laser beam scanning (LBS) based on resonant MEMS micro-mirrors is one technology currently being considered for the development of miniaturized image projection systems [1] [2]. Emerging micro-projection display applications include embedded pico-projectors for mobile devices and automotive head-up displays.…”

Section: Introductionmentioning

confidence: 99%

Air damping analysis in resonating micro-mirrors

Farrugia

Portelli

Grech

et al. 2018

2018 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP)

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The maximum scanning amplitude achievable by resonating micro-mirrors intended for micro-projection display applications is a function of air damping. Simplified analytical damping calculations can be employed in order to determine the damping moment of electrostatically actuated micro-mirrors however, their accuracy is limited. Three-dimensional computational fluid dynamic models are therefore presented to simulate the interaction of air with a MEMS micro-mirror oscillating at high frequency and large scan angles. Transient analyses were performed using the sliding mesh technique available in ANSYS Fluent to evaluate the dynamic fluid flow conditions present in vertical comb structures. The timedependent damping moment contributions due to viscous shear and pressure drag are subsequently computed for both mirror plate and comb drive structures. Good agreement in the overall quality factor is achieved between simulation and measurement results.

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Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators

et al. 2019

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Theoretical and finite element analysis of dynamic deformation in resonating micromirrors

Cited by 11 publications

References 16 publications

Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

Design and Fabrication of High Performance Resonant Micro-Mirrors using the Standard SOIMUMPs Process

Air damping analysis in resonating micro-mirrors

Air damping of high performance resonating micro-mirrors with angular vertical comb-drive actuators

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