Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488)
DOI: 10.1109/ugim.2003.1225751
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Theoretical and experimental study of fluid behavior of a peristaltic micropump

Abstract: An embedded PZT actuated peristaltic micropump that is a part of an implantable medical drug delivery system was designed and fabricated using Microelectromechanical Systems (MEMS) technology. Three embedded PZT actuators drive the three micropump chambers in a peristaltic motion. Static deflection data of the micropump chamber actuated by the PZT was measured using Atomic Force Microscope (AFM). The deflection data are linear below 90 volts and initiate a slightly non-linear behavior above 90 volts to 130 vol… Show more

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Cited by 8 publications
(4 citation statements)
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“…Mechanical pumps, typically employing actuated compliant diaphragms, can handle a large variety of fluids but often involve complicated structures (e.g., as required by check valves) and present integration challenges. Peristaltic micropumps [4][5][6][7][8][9], however, are a class of mechanical pumps that are relatively simple in structure and amenable to miniaturization and integration. In such devices, a series of diaphragms are actuated in sequence in a manner emulating wave-like muscle contractions of a tube-shaped organ, resulting in forward motion of fluids.…”
Section: Introductionmentioning
confidence: 99%
“…Mechanical pumps, typically employing actuated compliant diaphragms, can handle a large variety of fluids but often involve complicated structures (e.g., as required by check valves) and present integration challenges. Peristaltic micropumps [4][5][6][7][8][9], however, are a class of mechanical pumps that are relatively simple in structure and amenable to miniaturization and integration. In such devices, a series of diaphragms are actuated in sequence in a manner emulating wave-like muscle contractions of a tube-shaped organ, resulting in forward motion of fluids.…”
Section: Introductionmentioning
confidence: 99%
“…The testing results indicate that our type of actuator diaphragm offers a significant advantage over the conventional ones; increased displacement-several times that of a geometrically equivalent unimorph and bimorph-type actuators. From the experimental results, the present micropump could generate a flow rate up to 900µl/min with only 160 Vp-p (voltage peak to peak) applied voltage and 60 Hz frequency, higher than those of the previously developed peristaltic micropumps [11][12][13][14][15]. Finally, we have investigated the power consumption aspects of the developed micropump.…”
Section: Introductionmentioning
confidence: 91%
“…A piezoelectric ceramic actuator disc and two titanium fluid connectors are hermetically bonded to the chip 64 An IDDS that uses three embedded piezoelectric transducer actuators to drive the three micropump chambers in a peristaltic motion 65 A 70 mm × 35 mm × 1.63 mm peristaltic micropump designed and fabricated using DRIE, anodic bonding, radio frequency sputtering, and oxidation/deposition, that can deliver drug solution at 10 µL/min 66…”
Section: Implantable Mems‐based Drug Delivery Systems: Platformsmentioning
confidence: 99%
“…An IDDS that uses three embedded piezoelectric transducer actuators to drive the three micropump chambers in a peristaltic motion 65…”
Section: Implantable Mems‐based Drug Delivery Systems: Platformsmentioning
confidence: 99%