Theoretical analysis and experiment of multi-modal coupled vibration of piezo-driven Π-shaped resonator

Li, Lei; Liu, Hanbiao; Li, Dongfa; Zhang, Wen Ming

doi:10.1016/j.ymssp.2023.110223

Cited by 8 publications

(1 citation statement)

References 53 publications

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“…Parametric amplification (also often referred to as parametric pumping [2,8,10,11]) of an external harmonic signal is achieved by time modulating the system's intrinsic, usually stiffness, parameters. On the most basic level, the dynamics of the devices liable to parametric amplification are described by the (linear or nonlinear) nonhomogeneous counterpart of the Mathieu equation containing an additional forcing term [1][2][3][12][13][14]. As opposed to the case of parametric resonance, in the parametric amplification regime, the amplitude of the time-dependent stiffness modulation is lower than the parametric resonance threshold in a damped system.…”

Section: Introductionmentioning

confidence: 99%

Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields

Lulinsky,

Torteman,

Ilic

et al. 2024

Micromachines

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We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results show that omnidirectional acoustic pressure used as a noncontact source for linear harmonic driving is a convenient and versatile tool for the mechanical dynamic characterization of unpackaged, nonintegrated microstructures. The fringing field’s electrostatic actuation allows for efficient parametric amplification of an acoustic signal. The suggested amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and microphone arrays, and hearing aids. It can be used also for upward frequency tuning.

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