This paper presents the development of a CAD-based and vision-aided precision measurement system. A new coordinate system alignment technique for coordinate measuring machines (CMMs) is described. This alignment technique involves a machine vision system with CAD-based planning and execution of inspection. The determination method for measuring datums for the coordinate measuring technique, using the AutoCAD development system, is described in more detail. To improve image quality in the machine vision system, a contrast enhancement technique is used on the image background to reduce image noise, and an on-line calibration technique is applied. Some systematic errors may be caused by imperfect geometric features in components during coordinate system alignment. This measurement system approach, with its new measuring coordinate alignment method, can be used for high-precision measurement to overcome such errors.