X-Ray Spectroscopy 2012
DOI: 10.5772/28877
|View full text |Cite
|
Sign up to set email alerts
|

The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
5
0

Year Published

2017
2017
2024
2024

Publication Types

Select...
4
1
1

Relationship

0
6

Authors

Journals

citations
Cited by 6 publications
(5 citation statements)
references
References 11 publications
(15 reference statements)
0
5
0
Order By: Relevance
“…The software Stratagem was used for EDX measurements because first the volume irradiated by the electron beam and second the X-ray collected are related to a larger depth than the thickness of the top layer. [31] The atomic percentages were determined by considering a theoretical model for the probed zone [32]. For this, three layers were considered: first, Raman spectroscopy measurements were performed using a microconfocal Raman microscope (Renishaw inVia).…”
Section: Characterization Of the Nc Thin Filmsmentioning
confidence: 99%
“…The software Stratagem was used for EDX measurements because first the volume irradiated by the electron beam and second the X-ray collected are related to a larger depth than the thickness of the top layer. [31] The atomic percentages were determined by considering a theoretical model for the probed zone [32]. For this, three layers were considered: first, Raman spectroscopy measurements were performed using a microconfocal Raman microscope (Renishaw inVia).…”
Section: Characterization Of the Nc Thin Filmsmentioning
confidence: 99%
“…An accelerating voltage of 20 keV and a beam current of 20 nA were used with a defocused 3 μm beam. The produced X-ray intensities were subject to a PAP (phi-rho-z) matrix correction algorithm as described by Pouchou and Pichoir (1987) and reported by Christien et al, 63 and converted to concentrations by comparison to metal oxide standards. The concentration data for the major elements were collected on pressed power samples.…”
Section: ■ Experimental Sectionmentioning
confidence: 99%
“…An accelerating voltage of 20 keV and a beam current of 20 nA were used with a defocused 3 µm beam. The produced X-ray intensities were subject to a PAP (phi-rho-z) matrix correction algorithm as described by Pouchou and Pichoir (1987) and reported by Christien et al, 63 and converted to concentrations by comparison to metal oxide standards. The concentration data for the major elements were collected on pressed power samples.…”
Section: Catalyst Characterizationmentioning
confidence: 99%